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Exhibit 21.1
AMTECH SYSTEMS, INC. AND ITS SUBSIDIARIES
SUBSIDIARIES OF THE REGISTRANT
Name | Jurisdiction in which incorporated | |
Tempress Systems, Inc. | State of Texas | |
Tempress Group Holding BV | The Netherlands | |
Tempress Holdings BV | The Netherlands | |
Tempress Systems BV | The Netherlands | |
Tempress Manufacturing BV | The Netherlands | |
Tempress Engineering BV | The Netherlands | |
Tempress Onroerend Goed BV | The Netherlands | |
Tempress IP BV | The Netherlands | |
Tempress Asia Holding BV | The Netherlands | |
Tempress Hong Kong Limited | Hong Kong | |
P.R. Hoffman Machine Products, Inc | State of Arizona | |
Bruce Technologies, Inc | State of Massachusetts | |
Bruce Technologies Europe GmbH | Federal Republic of Germany | |
R2D Automation SAS | France | |
Amtech Tempress New Energy Technologies Limited | China | |
BTU International, Inc. | State of Delaware | |
BTU Overseas, Ltd. | State of Delaware | |
BTU Europe Ltd. | State of Delaware | |
BTU Overseas (Shanghai) Co., Ltd | State of Delaware | |
BTU Ltd. (Shanghai) | State of Delaware | |
SoLayTec B.V. | The Netherlands |