EXHIBIT 21 Thermo Electron Corporation - Subsidiaries of the Registrant At March 6, 1996, Thermo Electron Corporation owned the following companies: STATE OR JURISDICTION NAME OF PERCENT OF INCORPORATION OWNERSHIP - ------------------------------------------------------------------------------- Coleman Research Corporation Florida 100 Coleman Information Services Corporation Delaware 100 Nicolet Biomedical Inc. California 100 Eden Medical Electronics, Inc. Delaware 100 Eden Medizinische Elektronik GmbH Germany 100 Neuroscience Limited United Kingdom 100 Nicolet Biomedical Ltd. United Kingdom 100 Nicolet Biomedical S.A.R.L. France 100 Peter Brotherhood Holdings Ltd. United Kingdom 100 Peter Brotherhood Limited United Kingdom 100 D.S.T. Pattern & Engineering Co. Ltd. United Kingdom 100 FES International Limited United Kingdom 100 Link Control Technology Ltd. United Kingdom 100 Machtech Ltd. United Kingdom 100 Peter Brotherhood Pension Fund Trustees Ltd. United Kingdom 100 Sensonics Ltd. United Kingdom 100 Thermo Electron Realty Limited United Kingdom 100 Turboflex Limited United Kingdom 100 T & A Nash (Penn) Limited United Kingdom 100 Torsiflex Limited United Kingdom 100 (50% of which shares are owned directly by Peter Brotherhood Limited) Vikram Brotherhood Turbines Ltd. United Kingdom 51* Thermo Holdings Limited United Kingdom 100 Termo Electron, S.A. de C.V. Mexico 100 The Thermo Electron Companies Inc. Wisconsin 100 Bird Medical Technologies, Inc. California 100 Bird International, Inc. U. S. Virgin 100 Islands Bird Products Corporation California 100 Bird Life Design Corporation California 100 Stackhouse, Inc. California 100 Gulf Precision, Inc. Arizona 100 Seeley Enterprises, Inc. New Mexico 100 International Technidyne Corporation Delaware 100 International Technidyne Corporation Limited United Kingdom 100 Loftus Furnace Company Pennsylvania 100 Metal Treating Inc. Wisconsin 100 Met-Therm, Inc. Ohio 100 NAPCO, Inc. Connecticut 100 Nicolet Biomedical of California Inc. California 100 North Carbondale Minerals, Inc. California 100 North County Recycling, Inc. California 100 Overly, Inc. Wisconsin 100 Perfection Heat Treating Company Michigan 100 San Marcos Resource Recovery, Inc. California 100 Southern Ocean County Resource Recovery, Inc. New Jersey 100 Page 1PAGE Thermo Electron Corporation - Subsidiaries of the Registrant At March 6, 1996, Thermo Electron Corporation owned the following companies: STATE OR JURISDICTION NAME OF PERCENT OF INCORPORATION OWNERSHIP - ------------------------------------------------------------------------------- Staten Island Cogeneration Corporation New York 100 TE Great Lakes Inc. Michigan 100 TEC Cogeneration Inc. Florida 100 South Florida Cogeneration Associates Florida 50* TEC Energy Corporation California 100 North County Resource Recovery Associates California 100* (50% of which is owned directly by San Marcos Resource Recovery, Inc.) Tecomet Inc. Massachusetts 100 Thermedics Inc. Massachusetts 50.95** Analytical Technology, Inc. Delaware 100 Orion Foreign Sales Corp. U.S. Virgin 100 Islands Orion Research Limited United Kingdom 100 Orion Research Puerto Rico, Inc. Puerto Rico 100 Corpak Inc. Massachusetts 100 Walpak Company Illinois 100 Orion Research, Inc. Massachusetts 100 Russell pH Limited Scotland 100 Thermedics Detection Inc. Massachusetts 100 Rutter & Co. Netherlands 100 Rutter Instrumentation S.A.R.L. France 90 Systech B.V. Netherlands 50 ThermedeTec Corporation Delaware 100 Thermedics Detection de Argentina S.A. Argentina 100 (1% of which shares are owned directly by Thermedics Detection Inc.) Thermedics Detection de Mexico, S.A. de Mexico 100 C.V. Thermedics Detection GmbH Germany 100 Thermedics Detection Limited United Kingdom 100 Thermedics Detection Scandinavia AS Norway 100 Thermedics F. S. C. Inc. U. S. Virgin 100 Islands Thermo Sentron Inc. Delaware 100 Ramsey France S.A.R.L. France 100 Ramsey Ingenieros S.A. Spain 100 Ramsey Italia S.R.L. Italy 100 Tecno Europa Elettromeccanica S.R.L. Italy 100 Ramsey Technology Inc. Massachusetts 100 Xuzhou Ramsey Technology Co., Limited China 50* Thermedics Australia Pty. Ltd. Australia 100 Thermo Sentron B.V. Netherlands 100 Thermo Sentron Canada Inc. Canada 100 Thermo Sentron GmbH Germany 100 Thermo Sentron Limited United Kingdom 100 Hitech Electrocontrols Limited United Kingdom 100 Page 2PAGE Thermo Electron Corporation - Subsidiaries of the Registrant At March 6, 1996, Thermo Electron Corporation owned the following companies: STATE OR JURISDICTION NAME OF PERCENT OF INCORPORATION OWNERSHIP - ------------------------------------------------------------------------------- Hitech Licenses Ltd. United Kingdom 100 Hitech Metal Detectors Ltd. United Kingdom 100 Thermo Sentron SEC Corporation Massachusetts l00 Thermo Sentron (South Africa) Pty. Ltd. South Africa 100 TMD Securities Corporation Massachusetts 100 Thermo Cardiosystems Inc. Massachusetts 51.95** (additionally, 2.74% of the shares are owned directly by The Thermo Electron Companies Inc.) TCA Securities Corporation Massachusetts 100 Thermo Voltek Corp. Delaware 50.07** (additionally, 8.66% of the shares are owned directly by The Thermo Electron Companies Inc.) Comtest Europe B.V. Netherlands 100 Comtest Instrumentation, B.V. Netherlands 100 Comtest Limited United Kingdom 100 KeyTek FSC, Ltd. U.S. Virgin 100 Islands TVL Securities Corporation Delaware 100 UVC Realty Corp. New York 100 Thermo Administrative Services Corporation Delaware 100 Thermo Ecotek Corporation Delaware 82.73** Caribbean Cogeneration Company, Inc. Massachusetts 100 Delano Energy Company Inc. Delaware 100 Delano Operations Company, Inc. California 100 Eco Fuels Inc. Wyoming 100 Gatepeak Corporation Delaware 100 Independent Power Services Corporation Nevada 100 SFS Corporation New Hampshire 100 TCK Fuels Inc. Delaware 100 KFx Fuel Partners, L.P. Delaware 95* (2% of which is owned directly by Eco Fuels Inc.) Tenpeak Corporation Nevada 100 TES Securities Corporation Delaware 100 Thermendota, Inc. California 100 Mendota Biomass Power, Ltd. California 60* MBPL Agriwaste Corporation California 100 Thermo Ecotek International Holdings Inc. Cayman Islands 100 Thermo Ecotek International Inc. Cayman Islands 100 TCK Cogeneration Dominicana Inc. Cayman Islands 100 (1% of which shares are owned directly by Thermo Ecotek International Holdings Inc.) TCK Dominicana Holdings Inc. Cayman Islands 100 (1% of which shares are owned directly by Thermo Ecotek International Holdings Inc.) Thermo Electron of Maine, Inc. Maine 100 Page 3PAGE Thermo Electron Corporation - Subsidiaries of the Registrant At March 6, 1996, Thermo Electron Corporation owned the following companies: STATE OR JURISDICTION NAME OF PERCENT OF INCORPORATION OWNERSHIP - ------------------------------------------------------------------------------- Gorbell/Thermo Electron Power Company Maine 80* Thermo Electron of New Hampshire, Inc. New Hampshire 100 Hemphill Power and Light Company New Hampshire 66* Thermo Electron of Whitefield, Inc. New Hampshire 100 Whitefield Power and Light Company New Hampshire 100* (39% of which is owned directly by SFS Corporation) Thermo Fuels Company, Inc. California 100 Thermo Trilogy Corporation Delaware 100 Woodland Biomass Power, Inc. California 100 Woodland Biomass Power, Ltd. California 100* (.1% of which is owned directly by Thermo Ecotek Corporation) Thermo Electron Foundation, Inc. Massachusetts 100 Thermo Electron Metallurgical Services, Inc. Texas 100 Thermo Fibertek Inc. Delaware 80.74** AES Equipos y Sistemas S.A. de C.V. Mexico 100 Thermo AES Canada Inc. Canada 100 Thermo Electron Web Systems, Inc. Massachusetts 100 Fiberprep Inc. Delaware 95 (31.05% of which shares are owned directly by E. & M. Lamort, S.A.) Fiberprep Securities Corporation Delaware 100 Thermo Electron Wisconsin, Inc. Wisconsin 100 Thermo Fibergen Inc. Delaware 100 Thermo Fibertek U.K. Limited United Kingdom 100 Vickerys Holdings Limited United Kingdom 100 Vickerys Limited United Kingdom 100 Paperliners Limited New Zealand 100 Vickerys Projects Limited United Kingdom 100 Winterburn Limited United Kingdom 100 TMO Lamort Holdings Inc. Delaware 100 E. & M. Lamort, S.A. France 100 Lamort GmbH Germany 100 Lamort Italia S.R.L. Italy 100 Lamort Paper Services Ltd. United Kingdom 100 Nordiska Lamort Lodding A.B. Sweden 100 Thermo Instrument Systems Inc. Delaware 85.61** Analytical Instrument Development, Inc. Pennsylvania 100 ATI Acquisition Corp. Wisconsin 100 Mattson Instruments Limited United Kingdom 100 Unicam Analytical Inc. Canada 100 Unicam Analytical Technology Netherlands Netherlands 100 B.V. Unicam Analytische System GmbH Germany 100 Unicam France S.A. France 100 Unicam Italia SpA Italy 100 Page 4PAGE Thermo Electron Corporation - Subsidiaries of the Registrant At March 6, 1996, Thermo Electron Corporation owned the following companies: STATE OR JURISDICTION NAME OF PERCENT OF INCORPORATION OWNERSHIP - ------------------------------------------------------------------------------- Unicam S.A. Belgium 100 Unicam Technology Limited United Kingdom 100 Unicam Limited United Kingdom 100 Unicam Export Limited United Kingdom 100 Eberline Instrument Company Limited United Kingdom 100 Eberline Instrument Corporation New Mexico 100 Epsilon Industrial Inc. Texas 100 Gamma-Metrics California 100 Gamma-Metrics International F.S.C. Inc. Guam 100 Gas Tech Inc. California 100 Gas Tech Australia, Pty. Ltd. Australia 50 Gas Tech Partnership California 50* Gastech Instruments Canada Ltd. Canada 100 Houston Atlas Inc. Texas 100 National Nuclear Corporation California 100 Optek-Nicolet Holdings Inc. Wisconsin 100 Thermo Optek Corporation Delaware 100 Nicolet Instrument Corporation Wisconsin 100 Nicolet Japan K.K. Japan 100 Spectra-Tech, Europe Limited United Kingdom 100 Spectra-Tech, Inc. Wisconsin 100 Nicolet Instrument GmbH Germany 100 Nicolet Instrument S.A.R.L. France 100 Thermo Instrument Systems Japan Holdings, Delaware 100 Inc. Nippon Jarrell-Ash Company, Ltd. Japan 100 Thermo Jarrell Ash Corporation Massachusetts 100 Baird Do Brazil Representacoes Ltda. Brazil 100 Beijing Baird Analytical Instrument China 100 Technology Co. Limited Thermo Instrument Systems (F.E.) China 100 Limited Thermo Instruments (Canada) Inc. Canada 100 Eberline Instruments (Canada) Ltd. Canada 100 Thermo Optek Ltd. United Kingdom 100 Nicolet Instrument Limited United Kingdom 100 Planweld Limited United Kingdom 100 Hilger Analytical Limited United Kingdom 100 Thermo Electron Limited United Kingdom 100 Thermo Vision Corporation Delaware 100 CID Technologies Inc. New York 100 Oriel Corporation Delaware 100 Andor Technology Limited United Kingdom 51.25 Oriel Foreign Sales Corp. U. S. Virgin 100 Islands Scientific Measurement Systems Inc. Colorado 100 ThermoSpectra Corporation Delaware 72.39** Page 5PAGE Thermo Electron Corporation - Subsidiaries of the Registrant At March 6, 1996, Thermo Electron Corporation owned the following companies: STATE OR JURISDICTION NAME OF PERCENT OF INCORPORATION OWNERSHIP - ------------------------------------------------------------------------------- Beleggingsmaatschappij Zeis B.V. Netherlands 100 Bakker Electronics Dongen B.V. Netherlands 100 Bakker Electronics Limited United Kingdom 100 Diametrix Detectors, Inc. Delaware 50 Gould Instrument Systems, Inc. Ohio 100 Gould Instrument Systems GmbH Germany 100 NORAN Instruments GmbH Germany 100 Gould Instrument Systems Limited United Kingdom 100 Nicolet Technologies Ltd. United Kingdom 100 Gould Instruments S.A. France 100 Nicolet Instrument Technologies Inc. Wisconsin 100 Nicolet Technologies S.A.R.L. France 100 NORAN Instruments Inc. Wisconsin 100 Quest-Finnigan Holdings Inc. Virginia 100 Quest-TSP Holdings Inc. Delaware 100 ThermoQuest Corporation Delaware 100 (50% of which shares are owned directly by Quest-Finnigan Holdings Inc.) Extrel FTMS, Inc. Delaware 100 Finnigan Corporation Delaware 100 Finnigan Instruments, Inc. New York 100 Finnigan International Sales, Inc. California 100 Finnigan MAT China, Inc. California 100 Finnigan MAT (Delaware), Inc. Delaware 100 Finnigan MAT Instruments, Inc. Nevada 100 Finnigan MAT International Sales, Inc. California 100 Finnigan MAT (Nevada), Inc. Nevada 100 Finnigan MAT AG Switzerland 100 Finnigan MAT Canada, Ltd. Canada 100 Finnigan MAT S.A.R.L. France 100 Finnigan MAT S.R.L. Italy 100 Thermo Separation Products S.R.L. Italy 100 Thermo Instruments Australia Pty. Australia 100 Limited ThermoQuest Ltd. United Kingdom 100 Finnigan MAT Ltd. United Kingdom 100 Finnigan MAT AB Sweden 100 Thermo Separation Products Ltd. United Kingdom 100 Finnigan Properties, Inc. California 100 Thermo Instrument Systems (France) S.A. France 100 Thermo Separation Products S.A. France 100 Thermo Separation Products AG Switzerland 100 Thermo Separation Products Inc. Delaware 100 ThermoQuest GmbH Germany 100 Finnigan MAT GmbH Germany 100 Thermo Separation Products GmbH Germany 100 ThermoQuest K.K. Japan 100 Page 6PAGE Thermo Electron Corporation - Subsidiaries of the Registrant At March 6, 1996, Thermo Electron Corporation owned the following companies: STATE OR JURISDICTION NAME OF PERCENT OF INCORPORATION OWNERSHIP - ------------------------------------------------------------------------------- SID Instruments Inc. Delaware 100 ARL Inc. Delaware 100 FI Instruments Inc. Delaware 100 FI Ltd. United Kingdom 100 HB Instruments Inc. Delaware 100 Masslab Limited United Kingdom 100 NK Instruments Inc. Delaware 100 Thermo Elemental Limited United Kingdom 100 Thermo FAST UK Limited United Kingdom 100 Thermo Haake Ltd. United Kingdom 100 Thermo Labsystems Limited United Kingdom 100 Thermo SID (Australia) Pty. Ltd. Australia 100 Spectrace Instruments Inc. California 100 Thermo BioAnalysis Corporation Delaware 80.23** (7% of which shares are owned directly by Quest-TSP Holdings Inc. and 3% of which shares are owned directly by Quest-Finnigan Holdings Inc.) BioAnalysis International Sales Inc. Delaware 100 DLW Inc. Virginia 100 Dynatech Deutschland GmbH Germany 100 Dynatech Laboratories spol. s.r.o. Czech Republic 100 Thermo BioAnalysis (Guernsey) Limited Channel 100 Islands Thermo BioAnalysis Ltd. United Kingdom 100 Thermo BioAnalysis S.A. France 100 Thermo Environmental Instruments Inc. California 100 Thermo Instrument Controls Inc. Delaware 100 Thermo Instrument Controls de Mexico, S.A. Mexico 100 de C.V. (1% of which shares are owned directly by Thermo Instrument Systems Inc.) Thermo Instruments do Brasil Ltda. Brazil 100 (1% of which shares are owned directly by Thermo Jarrell Ash Corporation) Thermo Instruments F.S.C. Inc. U.S. Virgin 100 Islands TN Technologies Inc. Texas 100 TN Technologies Canada Inc. Canada 100 Van Hengel Holding B.V. Netherlands 100 Baird Europe B.V. Netherlands 100 Baird France S.A.R.L. France 100 Thermo Instrument Systems B.V. Netherlands 100 Euroglas B.V. Netherlands 100 Hilkomij B.V. Netherlands 100 NORAN Instruments B.V. Netherlands 100 Thermo Automation Services (ThAS) B.V. Netherlands 100 Van Oortmerssen B.V. Netherlands 100 Page 7PAGE Thermo Electron Corporation - Subsidiaries of the Registrant At March 6, 1996, Thermo Electron Corporation owned the following companies: STATE OR JURISDICTION NAME OF PERCENT OF INCORPORATION OWNERSHIP - ------------------------------------------------------------------------------- Thermo Instrument Systems GmbH Germany 100 (24% of which shares are owned directly by Thermo Instrument Systems Inc.) Eberline Instruments GmbH Germany 100 Thermo Instruments GmbH Germany 100 Thermo Jarrell Ash (Europe) B.V. Netherlands 100 Thermo Jarrell Ash, S.A. Spain 100 Thermo Separation Products B.V. Netherlands 100 Thermo Separation Products B.V. B.A. Belgium 100 TN Spectrace Europe B.V. Netherlands 100 Westronics Inc. Texas 100 Thermo Power Corporation Massachusetts 63.07** NuTemp, Inc. Illinois 100 Takepine Limited United Kingdom 100 Tecogen Securities Corporation Massachusetts 100 ThermoLyte Corporation Delaware 77.89** Thermo TerraTech Inc. Delaware 80.90** Holcroft (Canada) Limited Canada 100 Holcroft Corporation Delaware 100 Holcroft GmbH Germany 100 Metallurgical, Inc. Minnesota 100 Cal-Doran Metallurgical Services, Inc. California 100 Normandeau Associates, Inc. New Hampshire 100 Thermo Analytical Inc. Delaware 100 Skinner & Sherman, Inc. Massachusetts 100 Thermo Consulting & Design Inc. Delaware 100 Engineering Technology and Knowledge Delaware 100 Corporation Elson T. Killam Associates, Inc. New Jersey 100 Bettigole Andrews Clark & Killam New York 100 Associates Inc. N. H. Bettigole Co., Inc. Delaware 100 N. H. Bettigole, P.A. New Jersey 100 N. H. Bettigole, P.C. New York 100 Duncan, Lagnese and Associates, Pennsylvania 100 Incorporated E3-Killam, Inc. New York 100 Killam Associates, Inc. Ohio 100 Killam Management and Operational New Jersey 100 Services, Inc. Fellows, Read & Associates, Inc. New Jersey 100 Killam Associates, New England Inc. Delaware 100 George A. Schock & Associates, Inc. New Jersey 100 Jennison Engineering, Inc. Vermont 100 Thermo EuroTech N.V. Netherlands 62.27** Amerika Tankinstallaties B.V. Netherlands 100 Page 8PAGE Thermo Electron Corporation - Subsidiaries of the Registrant At March 6, 1996, Thermo Electron Corporation owned the following companies: STATE OR JURISDICTION NAME OF PERCENT OF INCORPORATION OWNERSHIP - ------------------------------------------------------------------------------- Grond- & Watersaneringstechniek Nederland Netherlands 100 B.V. High-Tech Trouble-Shooters B.V. Netherlands 100 Jac. Amerika en Zonen B.V. Netherlands 100 Refining & Trading Holland B.V. Netherlands 100 Thermo Remediation Inc. Delaware 67.61** (additionally, 1.26% of the shares are owned directly by The Thermo Electron Companies Inc.) Eberline Holdings Inc. Delaware 100 Eberline Analytical Corporation New Mexico 100 Thermo Hanford Inc. Delaware 100 TMA/NORCAL Inc. California 100 Remediation Technologies, Inc. Delaware 100 RETEC Thermal, Inc. Delaware 100 ReTec/Tetra L.C. Texas 50* Thermo Fluids Inc. Delaware 100 TPS Technologies Inc. Florida 100 TPST Soil Recyclers of California Inc. California 100 California Hydrocarbon, Inc. Nevada 100 TPST Soil Recyclers of Maryland Inc. Maryland 100 Todds Lane Limited Partnership Maryland 100* (1% of which is owned directly by TPS Technologies Inc.) TPST Soil Recyclers of New York Inc. New York 100 TPST Soil Recyclers of Oregon Inc. Oregon 100 TPST Soil Recyclers of South Carolina Delaware 100 Inc. TPST Soil Recyclers of Virginia Inc. Delaware 100 TPST Soil Recyclers of Washington Inc. Washington 100 TMA/Hanford, Inc. Washington 100 Thermo Securities Corporation Delaware 100 Thermo Soil Recyclers Inc. Massachusetts 100 Thermo Technology Ventures Inc. Idaho 100 Plasma Quench Investment Limited Partnership Delaware 60* ThermoTrex Corporation Delaware 50.83** ThermoLase Corporation Delaware 64.74** CBI Laboratories, Inc. Texas 100 ThermoTrex East Inc. Massachusetts 100 Trex Medical Corporation Delaware 91.48** Bennett X-Ray Corporation New York 100 Bennett International Corporation U. S. Virgin 100 Islands Eagle X-Ray, Inc. New York 100 Island X-Ray Incorporated New York 100 Thermo Lorad F.S.C. Inc. U. S. Virgin 100 Islands Page 9PAGE Thermo Electron Corporation - Subsidiaries of the Registrant At March 6, 1996, Thermo Electron Corporation owned the following companies: STATE OR JURISDICTION NAME OF PERCENT OF INCORPORATION OWNERSHIP - ------------------------------------------------------------------------------- TMO, Inc. Massachusetts 100 TMO TVL Investments Inc. Delaware 100 TMOI Inc. Delaware 100 Thermo Biomedical Inc. Delaware 100 Thermo Electron Export Inc. Barbados 100 (equally owned among TMO, TMD, TCA, TCK, TFT, THI, THP, TTT, TVL, TLZ, THS, Thermo BioAnalysis Corporation, Thermo Optek Corporation, ThermoQuest Corporation and Trex Medical Corporation) Thermo Electron F. S. C. Inc. U. S. Virgin 100 Islands Thermo Electron (London) Ltd. United Kingdom 50 Thermo Finance (UK) Limited United Kingdom 100 * Joint Venture/Partnership ** As of 12/30/95