Exhibit 32.1 CERTIFICATION OF PRINCIPAL EXECUTIVE OFFICER PURSUANT TO 18 U.S.C. SECTION 1350 AS ADOPTED PURSUANT TO SECTION 906 OF THE SARBANES - OXLEY ACT OF 2002 In connection with the quarterly report of Cimetrix, Incorporated (the "Company") on Form 10-Q for the quarter ended March 31, 2004, Robert H. Reback hereby certifies, pursuant to 18 U.S.C. Section 1350, as adopted pursuant to Section 906 of the Sarbanes-Oxley Act of 2002, that to the best of his knowledge: (1) The quarterly report fully complies with the requirements of Section 13(a) of the Securities Exchange Act of 1934; and (2) The information contained in the quarterly report fairly presents, in all material respects, the financial condition and results of operations of the Company. Date: May 14, 2004 /s/ Robert H. Reback - ------------------------------- Robert H. Reback President and Chief Executive Officer (Principal Executive Officer) -1-