Exhibit 21 Thermo Instrument Systems Inc. - Subsidiaries of the Registrant At March 6, 1996, Thermo Instrument Systems Inc. owned the following companies: STATE OR JURISDICTION OF PERCENT OF NAME INCORPORATION OWNERSHIP - ------------------------------------------------------------------------------ Thermo Instrument Systems Inc. Delaware 85.61** Analytical Instrument Development, Inc. Pennsylvania 100 ATI Acquisition Corp. Wisconsin 100 Mattson Instruments Limited United Kingdom 100 Unicam Analytical Inc. Canada 100 Unicam Analytical Technology Netherlands Netherlands 100 B.V. Unicam Analytische System GmbH Germany 100 Unicam France S.A. France 100 Unicam Italia SpA Italy 100 Unicam S.A. Belgium 100 Unicam Technology Limited United Kingdom 100 Unicam Limited United Kingdom 100 Unicam Export Limited United Kingdom 100 Eberline Instrument Company Limited United Kingdom 100 Eberline Instrument Corporation New Mexico 100 Epsilon Industrial Inc. Texas 100 Gamma-Metrics California 100 Gamma-Metrics International F.S.C. Inc. Guam 100 Gas Tech Inc. California 100 Gas Tech Australia, Pty. Ltd. Australia 50 Gas Tech Partnership California 50* Gastech Instruments Canada Ltd. Canada 100 Houston Atlas Inc. Texas 100 National Nuclear Corporation California 100 Optek-Nicolet Holdings Inc. Wisconsin 100 Thermo Optek Corporation Delaware 100 Nicolet Instrument Corporation Wisconsin 100 Nicolet Japan K.K. Japan 100 Spectra-Tech, Europe Limited United Kingdom 100 Spectra-Tech, Inc. Wisconsin 100 Nicolet Instrument GmbH Germany 100 Nicolet Instrument S.A.R.L. France 100 Thermo Instrument Systems Japan Holdings, Delaware 100 Inc. Nippon Jarrell-Ash Company, Ltd. Japan 100 Thermo Jarrell Ash Corporation Massachusetts 100 Baird Do Brazil Representacoes Ltda. Brazil 100 Beijing Baird Analytical Instrument China 100 Technology Co. Limited Thermo Instrument Systems (F.E.) China 100 Limited Thermo Instruments (Canada) Inc. Canada 100 Eberline Instruments (Canada) Ltd. Canada 100 Thermo Optek Ltd. United Kingdom 100 Nicolet Instrument Limited United Kingdom 100 Planweld Limited United Kingdom 100 Hilger Analytical Limited United Kingdom 100 Page 1PAGE Thermo Instrument Systems Inc. - Subsidiaries of the Registrant At March 6, 1996, Thermo Instrument Systems Inc. owned the following companies: STATE OR JURISDICTION NAME OF PERCENT OF INCORPORATION OWNERSHIP - ------------------------------------------------------------------------------ Thermo Electron Limited United Kingdom 100 Thermo Vision Corporation Delaware 100 CID Technologies Inc. New York 100 Oriel Corporation Delaware 100 Andor Technology Limited United Kingdom 51.25 Oriel Foreign Sales Corp. U. S. Virgin 100 Islands Scientific Measurement Systems Inc. Colorado 100 ThermoSpectra Corporation Delaware 72.39** Beleggingsmaatschappij Zeis B.V. Netherlands 100 Bakker Electronics Dongen B.V. Netherlands 100 Bakker Electronics Limited United Kingdom 100 Diametrix Detectors, Inc. Delaware 50 Gould Instrument Systems, Inc. Ohio 100 Gould Instrument Systems GmbH Germany 100 NORAN Instruments GmbH Germany 100 Gould Instrument Systems Limited United Kingdom 100 Nicolet Technologies Ltd. United Kingdom 100 Gould Instruments S.A. France 100 Nicolet Instrument Technologies Inc. Wisconsin 100 Nicolet Technologies S.A.R.L. France 100 NORAN Instruments Inc. Wisconsin 100 Quest-Finnigan Holdings Inc. Virginia 100 Quest-TSP Holdings Inc. Delaware 100 ThermoQuest Corporation Delaware 100 (50% of which shares are owned directly by Quest-Finnigan Holdings Inc.) Extrel FTMS, Inc. Delaware 100 Finnigan Corporation Delaware 100 Finnigan Instruments, Inc. New York 100 Finnigan International Sales, Inc. California 100 Finnigan MAT China, Inc. California 100 Finnigan MAT (Delaware), Inc. Delaware 100 Finnigan MAT Instruments, Inc. Nevada 100 Finnigan MAT International Sales, Inc. California 100 Finnigan MAT (Nevada), Inc. Nevada 100 Finnigan MAT AG Switzerland 100 Finnigan MAT Canada, Ltd. Canada 100 Finnigan MAT S.A.R.L. France 100 Finnigan MAT S.R.L. Italy 100 Thermo Separation Products S.R.L. Italy 100 Thermo Instruments Australia Pty. Australia 100 Limited ThermoQuest Ltd. United Kingdom 100 Finnigan MAT Ltd. United Kingdom 100 Finnigan MAT AB Sweden 100 Thermo Separation Products Ltd. United Kingdom 100 Finnigan Properties, Inc. California 100 Page 2PAGE Thermo Instrument Systems Inc. - Subsidiaries of the Registrant At March 6, 1996, Thermo Instrument Systems Inc. owned the following companies: STATE OR JURISDICTION NAME OF PERCENT OF INCORPORATION OWNERSHIP - ----------------------------------------------------------------------------- Thermo Instrument Systems (France) S.A. France 100 Thermo Separation Products S.A. France 100 Thermo Separation Products AG Switzerland 100 Thermo Separation Products Inc. Delaware 100 ThermoQuest GmbH Germany 100 Finnigan MAT GmbH Germany 100 Thermo Separation Products GmbH Germany 100 ThermoQuest K.K. Japan 100 SID Instruments Inc. Delaware 100 ARL Inc. Delaware 100 FI Instruments Inc. Delaware 100 FI Ltd. United Kingdom 100 HB Instruments Inc. Delaware 100 Masslab Limited United Kingdom 100 NK Instruments Inc. Delaware 100 Thermo Elemental Limited United Kingdom 100 Thermo FAST UK Limited United Kingdom 100 Thermo Haake Ltd. United Kingdom 100 Thermo Labsystems Limited United Kingdom 100 Thermo SID (Australia) Pty. Ltd. Australia 100 Spectrace Instruments Inc. California 100 Thermo BioAnalysis Corporation Delaware 80.23** (7% of which shares are owned directly by Quest-TSP Holdings Inc. and 3% of which shares are owned directly by Quest-Finnigan Holdings Inc.) BioAnalysis International Sales Inc. Delaware 100 DLW Inc. Virginia 100 Dynatech Deutschland GmbH Germany 100 Dynatech Laboratories spol. s.r.o. Czech Republic 100 Thermo BioAnalysis (Guernsey) Limited Channel 100 Islands Thermo BioAnalysis Ltd. United Kingdom 100 Thermo BioAnalysis S.A. France 100 Thermo Environmental Instruments Inc. California 100 Thermo Instrument Controls Inc. Delaware 100 Thermo Instrument Controls de Mexico, S.A. Mexico 100 de C.V. (1% of which shares are owned directly by Thermo Instrument Systems Inc.) Thermo Instruments do Brasil Ltda. Brazil 100 (1% of which shares are owned directly by Thermo Jarrell Ash Corporation) Thermo Instruments F.S.C. Inc. U.S. Virgin 100 Islands TN Technologies Inc. Texas 100 TN Technologies Canada Inc. Canada 100 Van Hengel Holding B.V. Netherlands 100 Page 3PAGE Thermo Instrument Systems Inc. - Subsidiaries of the Registrant At March 6, 1996, Thermo Instrument Systems Inc. owned the following companies: STATE OR JURISDICTION NAME OF PERCENT OF INCORPORATION OWNERSHIP - ------------------------------------------------------------------------------ Baird Europe B.V. Netherlands 100 Baird France S.A.R.L. France 100 Thermo Instrument Systems B.V. Netherlands 100 Euroglas B.V. Netherlands 100 Hilkomij B.V. Netherlands 100 NORAN Instruments B.V. Netherlands 100 Thermo Automation Services (ThAS) B.V. Netherlands 100 Van Oortmerssen B.V. Netherlands 100 Thermo Instrument Systems GmbH Germany 100 (24% of which shares are owned directly by Thermo Instrument Systems Inc.) Eberline Instruments GmbH Germany 100 Thermo Instruments GmbH Germany 100 Thermo Jarrell Ash (Europe) B.V. Netherlands 100 Thermo Jarrell Ash, S.A. Spain 100 Thermo Separation Products B.V. Netherlands 100 Thermo Separation Products B.V. B.A. Belgium 100 TN Spectrace Europe B.V. Netherlands 100 Westronics Inc. Texas 100 * Joint Venture/Partnership ** As of 12/30/95