EXHIBIT 23.1 CONSENT OF INDEPENDENT ACCOUNTANTS We hereby consent to the incorporation by reference in the Registration Statements on Form S-8 (No.33-25690, 33-18398, 33-42556, 33-47587) of Ceramics Process Systems Corporation of our report dated March 3, 2000 relating to the consolidated financial statements which appear in this 10-K. PRICEWATERHOUSECOOPERS LLP Boston, Massachusetts March 29, 2000