1 EXHIBIT 23.1 CONSENT OF INDEPENDENT ACCOUNTANTS We hereby consent to the incorporation by reference in the Registration Statement on Form S-8 (No. 333-67297) of American Xtal Technology, Inc. of our report dated March 20, 2000 relating to the financial statements, which appears in this Form 10-K. PricewaterhouseCoopers LLP San Jose, California April 13, 2000