1 EXHIBIT 23.2 CONSENT OF INDEPENDENT PUBLIC ACCOUNTANTS As independent public accountants, we hereby consent to the incorporation in this Form 8-K of our report dated October 30, 2000 with respect to the consolidated financial statements of GaSonics International Corporation included in the Form 10-K filed on December 26, 2000, and to the incorporation by reference into the previously filed Registration Statements on Form S-8 (File Nos. 333-11825, 33-88156, 33-51056, 33-36787, 33-62807, 333-35487, 333-65567, 333-80453, 333-5406, 333-5408) of Novellus Systems, Inc. /s/ ARTHUR ANDERSEN LLP San Jose, California May 30, 2001 43