EXHIBIT 23.1 INDEPENDENT AUDITORS' CONSENT We consent to the incorporation by reference in this Registration Statement of PDF Solutions, Inc. on Form S-8, of our reports dated January 18, 2002, appearing in the Annual Report on Form 10-K of PDF Solutions, Inc. filed with the Securities and Exchange Commission on April 1, 2002 (File No. 000-31311). /s/ DELOITTE & TOUCHE LLP San Jose, California January 9, 2003