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EXHIBIT 21.1
SUBSIDIARIES OF NOVELLUS
Novellus Systems International, Inc. Novellus Systems Japan
Novellus Systems Export, Inc. GaSonics International KK Japan
4000 N. First St. KSP Bldg., R&D C-10F,
San Jose, CA 95134 USA 3-2-1 Sakado, Takatsu-ku, Kawasaki-shi
T 408.943.9700 Kanagawa-ken 213-0012, Japan
F 408.943.3422 T 81.44.850.1777
F 81.44.850.1778
Novellus Systems UK Ltd.
The Forum Novellus Systems Korea Co. Ltd.
Callander Business Park SpeedFam-IPEC Korea Ltd.
Callander Road 2F, DaeWoo Engineering Building
Falkirk 9-3 SuNae-Dong, BunDang-Ku,
FK1 1XR SungNam City
T 44. 01324 639 988 Kyungki-Do, 463-020, Korea
F 44. 01324 612 069 T 82.31.738.1114
F 82.31.714.9921
Novellus Systems BV
148 Dillenburgstraat 5B Novellus Systems (H.K.) Ltd., Taiwan
5652 AM Eindhoven 9F, No. 6, Lane 99
The Netherlands Pu-Ting Road
T 31.40.2918010 Hsinchu City, Taiwan 300 R.O.C.
F 31.40.2573590 T 886.3.5730550
F 886.3.5730553
Novellus Systems SARL
Parc de la Julienne, Bat. D, 1er etage, Novellus Systems Semiconductor
91830 Le Coudray Montceaux Equipment (Shanghai) Co. Ltd.
France Unit 10 SOHO Building
T 33.1.64.93.7070 439 Chun Xiao Road, Pudong New Area,
F 33.1.64.93.8787 Shanghai 201203, P.R.China
T 86.21.50802056
Novellus Systems SARL F 86.21.50802103
1(degree) etage
Parc Technologique des Fontaines Novellus Systems International
Chemin des Fontaines Trading (Shanghai) Co. Ltd.
38190 Bernin Rm. 237, No. 2, Tai Zhong South Road,
France Waigaoqiao Free Trade Zone, Pudong New Area
T 33 476 08 00 00 Shanghai 200131, P.R. China
F 33 476 08 76 67 T 86.21.50802056
F 86.21.50802103
Novellus Systems GmbH
Moritzburger Weg 67, Entrance E 1st Floor Novellus Singapore Pte. Ltd.
01109 Dresden, SpeedFam-IPEC S.E. Asia Private Limited
Germany 101 Thomson Road
T 49.351.8838.3200 #24-03/05 United Square
F 49.351.8838.3299 Singapore 307591
T 65.6.353.9288
F 65.6.353.6833
Novellus Systems (Malaysia) Sdn. Bhd.
Novellus Systems Ireland Ltd. SpeedFam-IPEC (Malaysia) Sdn Bhd
GaSonics International Ireland Ltd Suite B3-1 Ground Floor
Mill Street Kulim Hi-Tech Park,
Maynooth, County Kildare 09000 Kulim
Ireland Kedah Darul Amam
T 353.1.629.3270 T 604.403.3368
F 353.1.601.6584 F 604.403.3378
Novellus Systems Israel Ltd. Novellus Systems (India) Pvt. Ltd.
GaSonics International Israel Ltd Le Parc Richmonde, 2nd Fl.
2 Tzoran St. (LC2-3S) 51 Richmond Road
The New Industrial Zone Bangalore, India 560025
Qiryat-Gat, 82109 T 91.80.2296146
T 972.7.666.2743 F 91.80.2296145
F 972.7.666.6677
SpeedFam-IPEC Limited
SpeedFam-IPEC, Inc. Brindley Road, Dodwells Bridge
Headquarters Industrial Estates
300 N. 56th Street Hinckley Leicestershire
Chandler, Arizona 85226 LE10 3BY England
Tel: 44.1455.631707
SpeedFam-IPEC GmbH Fax: 44.1455.611360
Schlosstrasse 5
D-74653 Ingelfingen SpeedFam-IPEC K.K.
Germany 2754-8 Hayakawa, Ayase-shi
Tel: 49.7940.58402 Kanagawa-ken, 252-1123, Japan
Fax: 49.7940.57611 Tel: 467.76.3138
Fax: 467.76.3343