EXHIBIT 32.1

                             NOVELLUS SYSTEMS, INC.

                                  CERTIFICATION

In connection with the periodic report of Novellus Systems, Inc. (the "Company")
on Form 10-Q for the period ended June 28, 2003 as filed with the Securities and
Exchange Commission (the "Report"), I, Richard S. Hill, Chairman of the Board of
Directors and Chief Executive Officer of the Company, hereby certify as of the
date hereof, solely for purposes of Title 18, Chapter 63, Section 1350 of the
United States Code, that to the best of my knowledge:

    (1) the Report fully complies with the requirements of Section 13(a) or
        15(d), as applicable, of the Securities Exchange Act of 1934, and

    (2) the information contained in the Report fairly presents, in all material
        respects, the financial condition and results of operations of the
        Company at the dates and for the periods indicated.

Date: August 11, 2003              By: /s/ Richard S. Hill
                                       -----------------------------------------
                                       Richard S. Hill
                                       Chairman of the Board of Directors and
                                       Chief Executive Officer