EXHIBIT 32.1

                             NOVELLUS SYSTEMS, INC.

                                 CERTIFICATION

In connection with the annual report of Novellus Systems, Inc. (the "Company")
on Form 10-K for the period ended December 31, 2003 as filed with the
Securities and Exchange Commission (the "Report"), I, Richard S. Hill, Chairman
of the Board of Directors and Chief Executive Officer of the Company, hereby
certify as of the date hereof, solely for purposes of Title 18, Chapter 63,
Section 1350 of the United States Code, that to the best of my knowledge:

    (1) the Report fully complies with the requirements of Section 13(a) or
        15(d), as applicable, of the Securities Exchange Act of 1934, and

    (2) the information contained in the Report fairly presents, in all
        material respects, the financial condition and results of operations of
        the Company at the dates and for the periods indicated.


    Date: March 12, 2004                  By: /s/ Richard S. Hill
                                             -----------------------------------
                                          Richard S. Hill
                                          Chairman of the Board of Directors and
                                          Chief Executive Officer