EXHIBIT 23.1 CONSENT OF INDEPENDENT REGISTERED PUBLIC ACCOUNTING FIRM We hereby consent to the incorporation by reference in the Registration Statements on Form S-3 (No. 333-85327, 333-89489, 333-54924, 333-56068, 333-63422, 333-69812 333-97227 and 333-109431) and Form S-8 (No. 033-70100, 333-1438, 333-31417, 333-45799, 333-71641, 333-94619, 333-46002, 333-61166, 333-69822 and 333-89590 and 333-109432) of Asyst Technologies, Inc. of our report dated June 4, 2004 relating to the financial statements and financial statement schedule, which appears in this Form 10-K. /s/ PricewaterhouseCoopers LLP San Jose, California June 9, 2004