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                                                                     Exhibit 2.7







                             CROSS-LICENSE AGREEMENT

                                     BETWEEN

                             VARIAN ASSOCIATES, INC.

                                   ("VARIAN")

                                       AND

                             NOVELLUS SYSTEMS, INC.

                                  ("NOVELLUS")












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                                TABLE OF CONTENTS

                                                                     
RECITALS..............................................................  Page 1

1       Definitions..................................................   Page 2

2       License Grants...............................................   Page 3

        2.1     Varian To Novellus...................................   Page 3

        2.2     Novellus To Varian...................................   Page 3

3       Ownership, Transfer of Know How..............................   Page 4

4       Enforcement of Rights........................................   Page 4

5       Confidentiality..............................................   Page 5

6       Term and Termination.........................................   Page 5

7       Assignment of License........................................   Page 6

8       Extent of Certain Obligations................................   Page 6

9       Miscellaneous Provisions.....................................   Page 6

        9.1     Notices..............................................   Page 6
        9.2     Section 365(n) of the U.S. Bankruptcy Code...........   Page 7
        9.3     Interpretation.......................................   Page 7
        9.4     Severability.........................................   Page 7
        9.5     No Third-Party Beneficiaries.........................   Page 8
        9.6     Amendment............................................   Page 8
        9.7     Further Assurances...................................   Page 8
        9.8     Mutual Drafting......................................   Page 8
        9.9     Governing Law........................................   Page 8
        9.10    Dispute Resolution...................................   Page 8
        9.11    Counterparts.........................................   Page 8
        9.12    Entire Agreement.....................................   Page 8






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               CROSS-LICENSE AGREEMENT BETWEEN VARIAN AND NOVELLUS

         CROSS-LICENSE AGREEMENT (together with Exhibit A hereto, the "Cross
License Agreement") dated as of May 7, 1997, by and between Varian Associates,
Inc., a Delaware corporation ("Varian"), and Novellus Systems, Inc., a
California corporation ("Novellus"). This Cross License Agreement shall be
effective as of the Closing Date of the Asset Purchase Agreement referenced
below (the "Effective Date").

RECITALS

         A. Varian, directly and indirectly through various foreign and domestic
affiliates of Varian, is engaged in the business of developing, manufacturing
and distributing PVD and CVD thin film deposition equipment, through its Thin
Film System Business ("TFS") (at times herein referred to as the "TFS
Business");

         B. Varian, directly and indirectly through various foreign and domestic
affiliates of Varian, is also engaged in the business of developing,
manufacturing and distributing ion implant equipment through its Ion Implant
System Business ("IIS") (at times herein referred to as the "IIS Business");

         C. Pursuant to the Asset Purchase Agreement, dated as of May 7, 1997
(the "Asset Purchase Agreement"), by and between Varian and Novellus, Varian has
agreed to sell and cause to be transferred to Novellus, and Novellus has agreed
to purchase and accept the transfer from Varian and Varian's affiliates, certain
of the assets and properties used primarily in the TFS Business.

         D. Varian desires to retain ownership of certain intellectual property
rights involved in the development, manufacture, testing and sale of the
products of both the TFS Business and the IIS Business, and is willing to grant
Novellus a license under these intellectual property rights.

         E. Varian desires to retain ownership of certain intellectual property
rights previously licensed to others and subject to payment of royalties to
Varian, involved in the development, manufacture, testing and sale of the
products of the TFS Business, and is willing to grant Novellus a license under
these intellectual property rights.

         F. Varian desires to receive, and Novellus, is willing to grant, a
license under the intellectual property transferred to Novellus pursuant to the
terms of the Asset Purchase Agreement.



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         G. Novellas desires to receive, and Varian is willing to grant, a
license under Varian intellectual property which was not transferred to Novellas
pursuant to the terms of the Asset Purchase Agreement.

              THEREFORE, in consideration of these premises and the respective
representations, warranties and agreements contained herein, the parties agree
as follows:

1        DEFINITIONS

1.1      "TFS Intellectual Property" has the same meaning as TFS Intellectual
         Property as defined in the Asset Purchase Agreement.

1.2      "TFS Products" means the products or components thereof manufactured by
         the TFS Business as a current part of its business operation as of the
         Effective Date, and products currently in development by the TFS
         Business and derivative products thereof and improvement products
         thereof.

1.3      "IIS Products" means the products or components thereof manufactured by
         the IIS Business as a current part of its business operation as of the
         Effective Date, and products currently in development by the IIS
         Business and derivative products thereof and improvement products
         thereof.

1.4      "Products of Varian" means products or components sold by Varian
         businesses as of the Effective Date, and products currently in
         development by Varian businesses and derivatives thereof and
         improvements thereof.

1.5      "Retained Intellectual Property" means (i) those patents listed on
         Exhibit A to this Cross License Agreement; (ii) patent applications and
         invention disclosures set forth in a letter, dated the date hereof,
         concurrently delivered by Varian to Novellas; and (iii) intellectual
         property, other than patents and patent applications, owned or
         controlled by Varian as of the Effective Date of this Cross License
         Agreement, and used in the TFS Business as of the Effective Date and
         which constitutes Excluded Assets as provided in Section 2.2 of the
         Asset Purchase Agreement.

1.6      "Term" means the period starting with the Effective Date and continuing
         until the termination or expiration of this Cross License Agreement, as
         provided in Section 6.1.

1.7      "Varian Field of Use" means: products other than TFS Products.

1.8      "Novellus Field of Use" means: PVD and CVD thin film deposition
         products.






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1.9      "Novellus Licensed Products" means any semiconductor manufacturing
         equipment in the equipment in the Novellus Field of Use that are
         developed, manufactured, sold or used by Novellus and its Subsidiaries
         and shall include without limitation, the TFS Products.

1.10     "Subsidiary" means, with respect to a specified company, an entity
         controlled, directly or indirectly by such company, including. without
         limitation, by such company's beneficial ownership of 50% or more of
         such entity's outstanding voting stock or other equity interests.

2        LICENSE GRANTS

2.1      VARIAN TO NOVELLUS: Varian hereby grants to Novellus, upon the terms
         and conditions herein specified, a royalty free, nonexclusive,
         irrevocable, world wide, perpetual license under the Retained
         Intellectual Property to make, have made, use and sell Novellus
         Licensed Products.

2.1.1    Subject to Section 2.4.1 of the Asset Purchase Agreement, Varian grants
         to Novellus a sublicense, without the right to grant Anther
         sublicenses, of all sublicensable rights granted to Varian in licenses
         from third parties that are Excluded Assets, but which relate to the
         ownership or use of the TFS Intellectual Property and the Retained
         Intellectual Property, that are required to permit Novellus to conduct
         business in the Novellus Field of Use.

2.1.2    Novellus shall not have the right to grant sublicenses to third parties
         under the Retained Intellectual Property, except with Varian's prior
         written permission.

2.2      NOVELLUS TO VARIAN: Novellus hereby grants to Varian, upon the term and
         conditions herein specified, a royalty free nonexclusive, irrevocable,
         world wide, perpetual license under the TFS Intellectual Property to
         make, have made, use and sell Products of Varian outside the Novellus
         Field of Use.

2.2.1    Subject to Section 2.4.1 of the Asset Purchase Agreement, Novellus
         grants to Varian a sublicense, without the right to grant further
         sublicenses, of all sublicensable rights granted to Varian in licenses
         from third parties that arc Assets transferred to Novellus, but which
         relate to the ownership or use of the Retained Intellectual Property
         and are required to permit Varian to conduct business in the Varian
         Field of Use.

2.2.2    Varian shall not have the right to grant sublicenses to third parties
         under the TFS Intellectual Property, except with Novellus's prior
         written permission.

2.3      SUBSIDIARIES. The license rights granted hereunder to each of Varian
         and Novellus shall extend to and may be exercised by Subsidiaries of
         either party. References herein to a party in this Section 2 and
         Section 5 below shall be deemed to refer to such party and each of its
         Subsidiaries. Each party shall be liable and responsible for full
         compliance with this Cross License Agreement by each of its
         Subsidiaries.



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2.4      FUTURE NOVELLUS PRODUCTS. Upon request by Novellus, Varian shall grant
         Novellus a nonexclusive, royalty bearing license under the Retained
         Intellectual Property to make, have made, use and sell semiconductor
         manufacturing equipment outside the Novellus Field of Use, but Varian
         shall not be required to grant any license to make, have made, use and
         sell IIS Products. The royalty for such a license shall be a reasonable
         royalty, provided that the royalty rate shall be no higher than the
         lowest royalty rate in any license granted by Varian to another party
         under the same intellectual property rights for the same or
         substantially similar equipment for which Novellus requests a license.

2.5      FUTURE VARIAN PRODUCTS. Upon request by Varian, Novellus shall grant
         Varian a nonexclusive, royalty bearing license under the TFS
         Intellectual Property to make, have made, use and sell semiconductor
         manufacturing equipment, other than IIS Products, in the Novellus Field
         of Use, but Novellus shall not be required to grant any license to
         make, have made, use and sell TFS Products. The royalty for such a
         license shall be a reasonable royalty, provided that the royalty rate
         shall be no higher than the lowest royalty rate in any license granted
         by Novellus to another party under the same intellectual property
         rights for the same or substantially similar equipment for which Varian
         requests a license.

3        OWNERSHIP, TRANSFER OF KNOW HOW

3.1      Varian shall retain ownership of the Retained Intellectual Property
         subject to the licenses granted in Section 2 of this Cross License
         Agreement. This Cross License Agreement shall not transfer any
         ownership rights to Novellus in the Retained Intellectual Property, and
         shall not transfer any ownership rights to Varian in the TFS
         Intellectual Property.

3.2      The licenses granted hereunder shall not extend to any improvements,
         enhancements, modifications or inventions developed or created by a
         party after the Effective Date, and the party developing or creating
         such improvements, enhancements or inventions after the Effective Date
         shall be the sole and exclusive owner thereof.

4        ENFORCEMENT OF RIGHTS

4.1      Varian may, at its sole option and expense, take action against any
         infringement or misappropriation of the Retained Intellectual Property.
         Any recovery by Varian as a result of such action shall belong
         exclusively to Varian.

4.2      Novellus may, at its sole option and expense, take action against any
         infringement or misappropriation of the TFS Intellectual Property. Any
         recovery by Novellus as a result of such action shall belong
         exclusively to Novellus.





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5        CONFIDENTIALITY

5.1      Novellus shall throughout the Term of this Cross License Agreement hold
         all confidential information relating to Retained Intellectual Property
         received from Varian in confidence, and shall preserve such
         confidential information against any disclosure to third parties except
         as otherwise expressly provided herein, using the same degree of care
         it exercises with its own proprietary information of a like nature;
         provided, however, that confidentiality shall not apply to information
         which is or becomes published or publicly known through no fault of
         Novellus; or which is rightfully received by Novellas from a third
         party without an obligation of secrecy; and, provided, further, that
         Novellus shall not be obliged to keep in confidence any information
         that is inherently disclosed by the sale of Products of Varian or of
         Novellus Licensed Products.

5.2      Varian shall throughout the Term of this Cross License Agreement hold
         all confidential information relating to TFS Intellectual Property in
         confidence, and shall preserve such confidential information against
         any disclosure to third parties, except as otherwise expressly provided
         herein, using the same degree of care it exercises with its own
         proprietary information of a like nature; provided, however, that
         confidentiality shall not apply to any information which is or becomes
         published or publicly known through no fault of Varian; or which is
         rightfully received by Varian from a third party without an obligation
         of secrecy; and, provided, further, that Varian shall not be obliged to
         keep in confidence any such information that is inherently disclosed by
         the sale of Novellus Licensed Products or of Products of Varian.

5.3      Notwithstanding the foregoing, Varian shall have the right to disclose
         the confidential information relating to the TFS Intellectual Property
         and Novellus shall have the right to disclose the confidential
         information relating to the Retained Intellectual Property as is
         reasonably required in the exercise of its license rights hereunder
         provided the recipient of such information agrees in writing to be
         bound by confidentiality provisions no less restrictive than this
         Section 5 with respect to any such confidential information so
         disclosed.

6        TERM AND TERMINATION

6.1      The Term of this Cross License Agreement shall begin on the Effective
         Date, and shall continue until the expiration of the last to expire
         patent included in the TFS Intellectual Property or in the Retained
         Intellectual Property, provided, however, that if the Asset Purchase
         Agreement shall terminate pursuant to Section 12 thereof, this Cross
         License Agreement shall terminate concurrently with the termination of
         the Asset Purchase Agreement.

6.2      Upon the expiration of this Cross License Agreement, the field of use
         restriction shall be removed from the license of any remaining
         intellectual property rights, and both parties shall have the right to
         make, use or sell products in any field of use.




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7        ASSIGNMENT OF LICENSE

7.1      Novellus may assign its rights and obligations under this Cross License
         Agreement to a successor in ownership of all or substantially all the
         assets of the TFS Business or sublicense its rights and obligations
         under this Cross License Agreement to a successor in ownership of
         substantially all the assets relating to a TFS Product, on the
         condition that such successor shall assume the performance of all the
         terms and conditions of this Cross License Agreement to be performed by
         Novellus as if the successor were named herein in the place of
         Novellus.

7.2      Varian may assign its rights and obligations under this Cross License
         Agreement to a successor in ownership of all or substantially all the
         assets of the IIS Business or sublicense its rights and obligations
         under this Cross License Agreement to a successor in ownership of
         substantially all the assets relating to a Varian product, on the
         condition that such successor shall assume the performance of all the
         terms and conditions of this Cross License Agreement to be performed by
         Varian as if the successor were named herein in the place of Varian.

8        EXTENT OF CERTAIN OBLIGATIONS

8.1      Nothing in this Cross License Agreement shall be construed as
         conferring upon Varian or Novellus any license or any other right
         unless expressly granted by the terms of this Cross License Agreement.

8.2      Varian represents that it has the full right and power to enter into
         this Cross License Agreement and to perform its obligations pursuant to
         the terms hereof, Novellus represents that it has the Ml right and
         power to enter into this Cross License Agreement and to perform its
         obligations pursuant to the terms hereof, provided that Novellus shall
         have no responsibility for any breach of the foregoing representation
         that is primarily the result of a breach by Varian of any term or
         condition of the Asset Purchase Agreement.

9        MISCELLANEOUS PROVISIONS

9.1      NOTICES. All notices and other communications given or made pursuant
         hereto shall be in writing and shall be deemed to have been duty given
         or made as of the, date delivered or mailed if delivered personally or
         mailed by registered or certified mail (postage prepaid, return receipt
         requested), or sent by facsimile transmission (confirmation received)
         to the parties at the following addresses and facsimile transmission
         numbers (or at such other address or number for a party as shall be
         specified by like notice), except that notices after the giving of
         which there is a designated period within which to perform an act and
         notices of changes of address or number shall be effective only upon
         receipt:



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         IF TO VARIAN:                                  with a copy to:                     
         Varian Associates, Inc.                   Varian Associates, Inc.             
         3050 Hansen Way                           3050 Hansen Way                     
         Palo Alto, California 94304-1000          Palo Alto, California 94304-1000    
         Attention: Chief Financial Officer        Attention: General Counsel          
         Telecopy No.: (415) 424-5754              Telecopy No.: (415) 858-2018        
         Telephone No.: (415) 424-5320             Telephone No.: (415) 424-5352       
                                                                                  
         IF TO NOVELLUS:                                with a copy to:                     
         Novellus Systems, Inc.                    Morrison & Foerster LLP             
         3970 North First Street                   755 Page Mill Road                  
         San Jose, CA 95134                        Palo Alto, CA 94304                 
         Attention:  Chief Financial Officer       Attention: Michael C. Phillips, Esq.
         Telecopy No.: (408) 858-2018              Telecopy No.: (415) 494-0792        
         Telephone No.: (408) 943-9700             Telephone No. (415) 813-5600        



9.2      SECTION 365(n) OF THE U.S. BANKRUPTCY CODE. All rights and licenses
         granted pursuant to this Agreement by a licensor to a licensee are, and
         shall otherwise be deemed to be, for purposes of Section 365(n) of the
         U.S. Bankruptcy Code, licenses of rights to "intellectual property" as
         defined under Section 101 of the Bankruptcy Code. The parties agree
         that a licensee, as a licensee of such rights under this Agreement,
         shall remain and may fully exercise all of its rights and elections
         under the Bankruptcy Code. The parties further agree that, in the event
         of a commencement of a bankruptcy proceeding by or against a licensor
         under the Bankruptcy Code, the licensee shall be entitled to a complete
         duplicate of any such intellectual property and all embodiments of such
         intellectual property, and same, if not already in its possession shall
         be promptly delivered to the licensee upon the licensee's written
         request (i) upon any such commencement of a bankruptcy proceeding,
         unless the licensor elects to continue to perform all of its
         obligations under this Agreement, or (ii) if not delivered under (I)
         above, upon the rejection of this Agreement by or on behalf of the
         licensor

9.3      INTERPRETATION. When a reference is made, in this Cross License
         Agreement to paragraphs or Exhibits, such reference shall be to a
         paragraph or Exhibit to this Cross License Agreement unless otherwise
         indicated. The words "include," "includes" and "including" when used
         herein shall be deemed in each case to be followed by the words
         "without limitation." The table of contents and the headings contained
         in this Cross License Agreement are for reference purposes only and
         shall not affect in any way the meaning or interpretation of this Cross
         License Agreement.

9.4      SEVERABILITY. If any term or other provision of this Cross License
         Agreement is invalid, illegal or incapable of being enforced by any
         rule of law or public policy, all other conditions and provisions of
         this Cross License Agreement shall nevertheless remain in full force
         and effect so long as the economic or legal substance of the
         transactions




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         contemplated hereby is not affected in any manner adverse to any Party.
         Upon such determination that any term or other provision is invalid,
         illegal or incapable of being enforced, the parties hereto shall
         negotiate in good faith to modify this Cross License Agreement so as to
         effect the original intent of the parties as closely as possible in an
         acceptable manner to the end that transactions contemplated hereby are
         fulfilled to the greatest extent possible.

9.5      NO THIRD-PARTY BENEFICIARIES. This Cross License Agreement is for the
         sole benefit of the parties hereto and their permitted assigns and
         nothing herein expressed or implied shall give or be construed to give
         to any Person, other than the parties hereto and such assigns, any
         legal or equitable rights hereunder.

9.6      AMENDMENT. This Cross License Agreement may not be amended or modified
         except by an instrument in writing signed by Varian and Novellus.

9.7      FURTHER ASSURANCES. Each party agrees to cooperate fully with the other
         parties and to execute such further instruments, documents and
         agreements and to give such further written assurances as may be
         reasonably requested by any other party to evidence and reflect the
         transactions described herein and contemplated hereby and to carry into
         effect the intents and purposes of this Cross License Agreement.

9.8      MUTUAL DRAFTING. This Cross License Agreement is the joint product of
         Novellus and Varian and each provision hereof has been subject to the
         mutual consultation, negotiation and agreement of Novellus and Varian
         and shall not be construed for or against any party hereto.

9.9      GOVERNING LAW. This Cross License Agreement shall be governed by, and
         construed in accordance with, the laws of the State of California
         (without giving effect to its choice of law principles).

9.10     DISPUTE RESOLUTION. Any dispute, controversy or claim between the
         parties relating to, arising out of or in connection with this Cross
         License Agreement (or any subsequent agreements or amendments thereto).
         including as to its existence, enforceability, validity,
         interpretation, performance, breach or damages, including claims in
         tort, whether arising before or after the termination of this Cross
         License Agreement, shall be settled in accordance with the procedures
         set forth in Section 13.8 of the Asset Purchase Agreement.

9.11     COUNTERPARTS. This Cross License Agreement may be executed in one or
         more counterparts, and by the different parties hereto in separate
         counterparts, each of which when executed shall be deemed to be an
         original but all of which taken together shall constitute one and the
         same agreement.

9.12     ENTIRE AGREEMENT. This Cross License Agreement, together with Exhibits
         hereto, and the documents and instruments and other agreements among
         the parties delivered pursuant






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         hereto, constitute the entire agreement and supersede all prior
         agreements and undertakings, both written and oral, other than the
         Asset Purchase Agreement and the Confidentiality Agreement dated
         February 28, 1997, between Varian and Novellus with respect to the
         subject matter hereof and are not intended to confer upon any other
         person or entity any rights or remedies hereunder, except as otherwise
         expressly provided herein. This Cross License Agreement is subject to
         the terms of those agreements, including the noncompete covenant in
         Section 7.6 of the Asset Purchase Agreement.

         IN WITNESS WHEREOF, Varian and Novellus have caused this Cross License
Agreement to be executed as of the date first written above by their respective
officers thereunto duly authorized.



                                       VARIAN ASSOCIATES, INC.,
                                        a Delaware corporation

                                       By____________________________________
                                          Name:
                                          Title:

                                       NOVELLUS SYSTEMS, INC.
                                        a California corporation

                                       By____________________________________
                                          Name:
                                          Title:













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Pursuant to Item 601(b)(2) of Regulation S-K, the following exhibit to this
Cross-License Agreement Between Varian Associates, Inc. and Novellus Systems,
Inc. has been omitted. Such exhibit will be submitted to the Securities and
Exchange Commission upon request.

Exhibit A: A list of the patents, pursuant to which the Registrant is granted by
Varian a nonexclusive license pursuant to the terms of the Cross-License
Agreement.