1 EXHIBIT 23.02 CONSENT OF DELOITTE & TOUCHE LLP We consent to the incorporation by reference in Registration Statements No. 33-94716 and 333-02360 of AG Associates, Inc. on Form S-8 of our reports dated November 4, 1997, included in the Annual Report on Form 10-K of AG Associates, Inc. for the year ended September 30, 1997. DELOITTE & TOUCHE LLP San Jose, California December 26, 1997