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                                                                    EXHIBIT 23.1



                         INDEPENDENT AUDITORS' CONSENT

     We consent to the incorporation by reference in Registration Statements
Nos. 33-31298, 33-85020 and 333-39499 of Silicon Valley Group, Inc. on Forms
S-8 of our reports dated October 27, 1997 appearing in and incorporated by
reference in this Annual Report on Form 10-K of Silicon Valley Group, Inc. for
the year ended September 30, 1997.


/s/ Deloitte & Touche LLP
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DELOITTE & TOUCHE LLP
San Jose, California
December 29, 1997