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                                                                    EXHIBIT 21.1
 
                         SUBSIDIARIES OF THE REGISTRANT
 
1. Lotus Technologies, Inc. -- California
 
2. Intevac Foreign Sales Corporation -- Barbados
 
3. Intevac Asia Private Limited -- Singapore
 
4. Intevac GmbH -- Germany
 
5. Intevac Malaysia Sdn Bhd -- Malaysia
 
6. RPC Technologies, Inc. -- California