1 EXHIBIT 23.01 CONSENT OF DELOITTE & TOUCHE LLP We consent to the incorporation by reference in Registration Statements No. 33-94716 and 333-02360 of AG Associates, Inc. on Form S-8 of our reports dated October 23, 1998, included in the Annual Report on Form 10-K of AG Associates, Inc. for the year ended September 30, 1998. DELOITTE & TOUCHE LLP San Jose, California December 22, 1998