1 EXHIBIT 23.1 CONSENT OF INDEPENDENT ACCOUNTANTS We hereby consent to the incorporation by reference in the Registration Statement on Form S-8 filed with the Securities and Exchange Commission on November 13, 1998 of American Xtal Technology Inc. of our report dated January 28, 1999 appearing on page 37 of this Annual Report on Form 10-K. PRICEWATERHOUSECOOPERS LLP San Jose, California March 30, 1999