1



                                                                    EXHIBIT 23.1

                          INDEPENDENT AUDITORS' CONSENT

    We consent to the incorporation by reference in the Registration Statements
Nos. 33-31298, 33-85020, 333-39499 and 333-80079 of Silicon Valley Group, Inc.
on Forms S-8 of our report dated October 25, 1999 appearing in this Annual
Report on Form 10-K of Silicon Valley Group, Inc. for the year ended September
30, 1999.

/s/ DELOITTE & TOUCHE LLP
- ------------------------------------
Deloitte & Touche LLP

San Jose, California
December 20, 1999