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                                                                      EXHIBIT 21
 
                         SUBSIDIARIES OF THE REGISTRANT
 
     Align-Rite International, Inc. is incorporated in the State of California.
 
     The following table, in which an indentation indicates a parent-subsidiary
relationship, shows the Company's subsidiaries as of March 31, 1996, the
percentage of their voting securities then owned by the Company or the
subsidiary's immediate parent, and the jurisdiction under which each subsidiary
is incorporated. These subsidiaries are included in the Company's consolidated
financial statements.
 


                                                                                    PERCENTAGE
                                                                                    OF VOTING
                                                               JURISDICTION      SECURITIES OWNED
                                                                    OF              BY COMPANY
                                                               INCORPORATION      OR SUBSIDIARY
                                                              ---------------    ----------------
                                                                           
Align-Rite International Limited............................  United Kingdom            100
  Align-Rite Limited........................................  United Kingdom            100
  Align-Rite Corporation....................................  Nevada, USA.              100

 
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