1 EXHIBIT 21 SUBSIDIARIES OF THE REGISTRANT Align-Rite International, Inc. is incorporated in the State of California. The following table, in which an indentation indicates a parent-subsidiary relationship, shows the Company's subsidiaries as of March 31, 1996, the percentage of their voting securities then owned by the Company or the subsidiary's immediate parent, and the jurisdiction under which each subsidiary is incorporated. These subsidiaries are included in the Company's consolidated financial statements. PERCENTAGE OF VOTING JURISDICTION SECURITIES OWNED OF BY COMPANY INCORPORATION OR SUBSIDIARY --------------- ---------------- Align-Rite International Limited............................ United Kingdom 100 Align-Rite Limited........................................ United Kingdom 100 Align-Rite Corporation.................................... Nevada, USA. 100 69