EXHIBIT 23.1 - CONSENT OF INDEPENDENT AUDITORS ---------------------------------------------- We consent to the incorporation by reference, in the Registration Statement (Form S-8 No. 33-94450) pertaining to the 1991 Stock Option Plan of Plasma & Materials Technologies, Inc. of our report dated February 26, 1997, with respect to the consolidated financial statements of Trikon Technologies, Inc. included in the Annual Report on Form 10-K of Trikon Technologies, Inc. for the year ended December 31, 1996. /s/ ERNST & YOUNG Chartered Accountants Registered Auditor Woodland Hills, California April 11, 1997