Exhibit 23.1


                          CONSENT OF ERNST & YOUNG LLP


We consent to the incorporation by reference in the Registration Statement (Form
S-8) pertaining to the Axcelis Technologies,  Inc. Employee Stock Purchase Plan,
of our  report  dated May 3,  2000,  except for Note 19, as to which the date is
June 14,  2000,  with respect to the combined  financial  statements  of Axcelis
Technologies, Inc. included in its Prospectus filed on July 11, 2000, filed with
the Securities and Exchange Commission.


                                /s/ Ernst & Young LLP

Boston, Massachusett
October 31, 2000