Exhibit 23.1



                          CONSENT OF ERNST & YOUNG LLP


We consent to the incorporation by reference in the Registration Statement (Form
S-8) pertaining to the Axcelis Technologies, Inc. 2000 Stock Plan, of our report
dated May 3, 2000,  except  for Note 19, as to which the date is June 14,  2000,
with respect to the combined financial statements of Axcelis Technologies,  Inc.
included  in its  Prospectus,  filed on July 11,  2000 with the  Securities  and
Exchange Commission.


                                /s/ Ernst & Young LLP

Boston, Massachusetts
October 31, 2000