SECURITIES AND EXCHANGE COMMISSION

                             Washington, D.C. 20549

                                    FORM 8-K

                                 CURRENT REPORT

                       Pursuant to Section 13 or 15(d) of
                       The Securities Exchange Act of 1934

         Date of Report (Date of earliest event reported): June 20, 2002

                                 ADE CORPORATION
             (Exact name of registrant as specified in its charter)

       Massachusetts                 0-26714                 04-2441829
(State or other jurisdiction       (Commission               (IRS Employer
     of incorporation)             File Number)           Identification No.)

                                  80 Wilson Way
                          Westwood, Massachusetts 02090
          (Address of principal executive offices, including zip code)




                                 (781) 467-3500
              (Registrant's telephone number, including area code)







Item 5.  Other Events

         On June  20,  2002,  ADE  Corporation  (the  "Company")  announced  the
election of Chris Koliopoulos,  Ph.D., as president and chief executive officer,
effective  immediately.  He succeeds Robert C. Abbe, who had served as president
and  chief  executive  officer  since  he  founded  the  Company  in  1967.  Dr.
Koliopoulos  will continue to serve as a director of the Company.  Mr. Abbe will
become a consultant to the Company and remains a member of the  Company's  Board
of Directors. For more information,  see the Company's press release, dated June
20, 2002, which is attached herewith as Exhibit 99 and incorporated by reference
herein.

Item 7.  Financial Statements, Pro Forma Financial Information and Exhibits

(c)      Exhibits.

Exhibit No.       Item

99                Press Release, dated June 20, 2002.







                                   SIGNATURES


         Pursuant to the  requirements  of the Securities  Exchange Act of 1934,
the  Registrant  has duly  caused  this report to be signed on its behalf by the
undersigned thereunto duly authorized.

                              ADE CORPORATION
                              (Registrant)




                              By: /s/ Brian C. James
                                 Brian C. James
                                 Executive Vice President, Treasurer and Chief
                                 Financial Officer



Date:   June 27, 2002