EXHIBIT 3.1.1 THE COMMONWEALTH OF MASSACHUSETTS WILLIAM FRANCIS GALVIN Secretary of the Commonwealth One Ashburton Place, Boston, Massachusetts 02108-1512 ARTICLES OF AMENDMENT (General Laws, Chapter 156B, Section 72) We, MARTIN J. REID , President ---------------------------------------------------------------- and DEBRA L. NELSON , Clerk -------------------------------------------------------------------- of IBIS TECHNOLOGY CORPORATION , --------------------------------------------------------------------------- (EXACT NAME OF CORPORATION) located at 32 CHERRY HILL DRIVE, DANVERS, MA 01923 , -------------------------------------------------------------------- (STREET ADDRESS OF CORPORATION IN MASSACHUSETTS) certify that these Articles of Amendment affecting articles numbered: 3 - -------------------------------------------------------------------------------- (NUMBER THOSE ARTICLES 1, 2, 3, 4, 5 AND/OR 6 BEING AMENDED) of the Articles of Organization were duly adopted at a meeting held on May 14, 1998 , by vote of: 5,700,999 shares of COMMON of 6,705,340 shares outstanding being at least a majority of each type, class or series outstanding and entitled to vote thereon: To CHANGE the number of shares and the par value (if any) of any type, class or series of stock which the corporation is authorized to issue, fill in the following: The total PRESENTLY authorized is: - ---------------------------------------------------------- ---------------------------------------------------------------------- WITHOUT PAR VALUE STOCKS WITH PAR VALUE STOCKS - ------------------------- -------------------------------- -------------- ------------------------------ ------------------------ TYPE NUMBER OF SHARES TYPE NUMBER OF SHARES PAR VALUE - ------------------------- -------------------------------- -------------- ------------------------------ ------------------------ Common: Common: 10,000,000 $.008 - ------------------------- -------------------------------- -------------- ------------------------------ ------------------------ - ------------------------- -------------------------------- -------------- ------------------------------ ------------------------ Preferred: Preferred: 2,000,000 $ .01 - ------------------------- -------------------------------- -------------- ------------------------------ ------------------------ - ------------------------- -------------------------------- -------------- ------------------------------ ------------------------ CHANGE the total authorized to: - ---------------------------------------------------------- ---------------------------------------------------------------------- WITHOUT PAR VALUE STOCKS WITH PAR VALUE STOCKS - ------------------------- -------------------------------- -------------- ------------------------------ ------------------------ TYPE NUMBER OF SHARES TYPE NUMBER OF SHARES PAR VALUE - ------------------------- -------------------------------- -------------- ------------------------------ ------------------------ Common: Common: 20,000,000 $.008 - ------------------------- -------------------------------- -------------- ------------------------------ ------------------------ - ------------------------- -------------------------------- -------------- ------------------------------ ------------------------ Preferred: Preferred: 2,000,000 $ .01 - ------------------------- -------------------------------- -------------- ------------------------------ ------------------------ - ------------------------- -------------------------------- -------------- ------------------------------ ------------------------ The foregoing amendment(s) will become effective when these Article of Amendments are filed in accordance with General Laws, Chapter 156B, Section 6 unless the articles specify, in accordance with the vote adopting the amendment, a LATER effective date not more than THIRTY DAYS after such filing, in which event the amendment will become effective on such later date. Later effective date: ____________________________________. SIGNED UNDER THE PENALTIES OF PERJURY, this 14th day of May, 1998, /S/ MARTIN J. REID, President . /S/ DEBRA L. NELSON, Clerk THE COMMONWEALTH OF MASSACHUSETTS ARTICLES OF AMENDMENT (GENERAL LAWS, CHAPTER 156B, SECTION 72) ---------- I hereby approve the within Articles of Amendment and, the filing fee in the amount of $10,000.00 having been paid, said articles are deemed to have been filed with me this 21st day of May 1998. EFFECTIVE DATE ------------------------------- /s/ William Francis Galvin WILLIAM FRANCIS GALVIN SECRETARY OF THE COMMONWEALTH TO BE FILLED IN BY CORPORATION PHOTOCOPY OF DOCUMENT TO BE SENT TO: ANNE T. LELAND, LEGAL ASSISTANT MINTZ, LEVIN, COHN, FERRIS, GLOVSKY AND POPEO, P.C. ONE FINANCIAL CENTER, BOSTON, MA 02111 617 542-6000