Exhibit 3.1.1 THE COMMONWEALTH OF MASSACHUSETTS WILLIAM FRANCIS GALVIN Secretary of the Commonwealth One Ashburton Place, Boston, Massachusetts 02108-1512 ARTICLES OF AMENDMENT (General Laws, Chapter 156B, Section 72) We, Martin J. Reid , *President --------------------------------------------------------------- and Debra L. Nelson , *Clerk --------------------------------------------------------------- of Ibis Technology Corporation , ----------------------------------------------------------------------------- (EXACT NAME OF CORPORATION) located at 32 CHERRY HILL DRIVE, DANVERS, MA 01923 , --------------------------------------------------------------------- (STREET ADDRESS OF CORPORATION IN MASSACHUSETTS) certify that these Articles of Amendment affecting articles numbered: 3 - -------------------------------------------------------------------------------- (NUMBER THOSE ARTICLES 1, 2, 3, 4, 5 AND/OR 6 BEING AMENDED) of the Articles of Organization were duly adopted at a meeting held on May 14, 1998, by vote of: 5,700,999 shares of COMMON of 6,705,340 shares outstanding - --------- ----------- --------------- (TYPE, CLASS & SERIES, IF ANY) _________ shares of ___________ of _______________ shares outstanding (TYPE, CLASS & SERIES, IF ANY) _________ shares of ___________ of _______________ shares outstanding (TYPE, CLASS & SERIES, IF ANY) being at least a majority of each type, class or series outstanding and entitled to vote thereon: To CHANGE the number of shares and the par value (if any) of any type, class or series of stock which the corporation is authorized to issue, fill in the following: The total PRESENTLY authorized is: - ------------------------------------------------------------------------------------------------------ WITHOUT PAR VALUE STOCKS WITH PAR VALUE STOCKS - ------------------------------------------------------------------------------------------------------ TYPE NUMBER OF SHARES TYPE NUMBER OF SHARES PAR VALUE - ------------------------------------------------------------------------------------------------------ Common: Common: 10,000,000 $.008 - ------------------------------------------------------------------------------------------------------ - ------------------------------------------------------------------------------------------------------ Preferred: Preferred: 2,000,000 $ 01 - ------------------------------------------------------------------------------------------------------ - ------------------------------------------------------------------------------------------------------ CHANGE the total authorized to: - ------------------------------------------------------------------------------------------------------ WITHOUT PAR VALUE STOCKS WITH PAR VALUE STOCKS - ------------------------------------------------------------------------------------------------------ TYPE NUMBER OF SHARES TYPE NUMBER OF SHARES PAR VALUE - ------------------------------------------------------------------------------------------------------ Common: Common: 20,000,000 $.008 - ------------------------------------------------------------------------------------------------------ - ------------------------------------------------------------------------------------------------------ Preferred: Preferred: 2,000,000 $ .01 - ------------------------------------------------------------------------------------------------------ - ------------------------------------------------------------------------------------------------------ The foregoing amendment(s) will become effective when these Article of Amendments are filed in accordance with General Laws, Chapter 156B, Section 6 unless the articles specify, in accordance with the vote adopting the amendment, a LATER effective date not more than THIRTY DAYS after such filing, in which event the amendment will become effective on such later date. Later effective date: ____________________________________. SIGNED UNDER THE PENALTIES OF PERJURY, this 14th day of May, 1998, /s/ Martin J. Reid , President - ----------------------------------------------------- /s/ Debra L. Nelson , Clerk - ----------------------------------------------------- THE COMMONWEALTH OF MASSACHUSETTS ARTICLES OF AMENDMENT (GENERAL LAWS, CHAPTER 156B, SECTION 72) I hereby approve the within Articles of Amendment and, the filing fee in the amount of $10,000.00 having been paid, said articles are deemed to have been filed with me this 21st day of May 1998. EFFECTIVE DATE ___________________________ /s/ William Francis Galvin WILLIAM FRANCIS GALVIN SECRETARY OF THE COMMONWEALTH TO BE FILLED IN BY CORPORATION PHOTOCOPY OF DOCUMENT TO BE SENT TO: ANNE T. LELAND, LEGAL ASSISTANT MINTZ, LEVIN, COHN, FERRIS, GLOVSKY AND POPEO, P.C. ONE FINANCIAL CENTER, BOSTON, MA 02111 617 542-6000