21. List of Subsidiaries of the Company The following is a list of Integrated Measurement Systems, Inc. operating subsidiaries. Integrated Measurement Systems, Inc. has no parent companies. Subsidiary Percent Owned Integrated Measurement Systems FSC, Inc. 100% Integrated Measurement Systems (Europe) AG 100% IMS Europe Ltd. 100% Integrated Measurement Systems (France) Sarl 100% Integrated Measurement Systems (Deutschland) GmbH 100% Integrated Measurement Systems (Japan) KK 100% Integrated Measurement Systems (M) Sdn. Bdn. 100% Integrated Measurement Systems (P) Inc. 100% F-33