EXHIBIT 23

                         CONSENT OF INDEPENDENT AUDITORS


The Board of Directors and Stockholders
Ibis Technology Corporation:

         The audits referred to in our report dated February 2, 2001, included
the related financial statement schedule for each of the years in the three-year
period ended December 31, 2000, included in the annual report on Form 10-K. The
financial statement schedule is the responsibility of the Company's management.
Our responsibility is to express an opinion on the financial statement schedule
based on our audits. In our opinion, such financial statement schedule, when
considered in relation to the basic financial statements taken as a whole,
presents fairly in all material respects the information set forth therein.

         We consent to incorporation by reference in the registration
statements (No. 333-1174) on Form S-1, (No. 33-78440) on Form S-3, (No.
333-9237) on Form S-3, (No. 333-82497) on Form S-3, (No. 333-9239) on Form
S-8, (No. 33-81452) on Form S-8, (No. 333-45247) on Form S-8, and (No.
333-36706) on Form S-8 of Ibis Technology Corporation of our report dated
February 2, 2001, relating to the balance sheets of Ibis Technology
Corporation as of December 31, 1999 and 2000, and the related statements of
operations, stockholders' equity, and cash flows for each of the years in the
three-year period ending December 31, 2000, which report appears in the
December 31, 2000 annual report on Form 10-K of Ibis Technology Corporation.



                                                    KPMG LLP

Boston, Massachusetts
March 20, 2001