SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 Date of Report (Date of earliest event reported): JULY 16, 2001 IBIS TECHNOLOGY CORPORATION ------------------------------------------------------ (Exact name of registrant as specified in its charter) MASSACHUSETTS 0-23150 04-2987600 (State or other (Commission (IRS Employer jurisdiction of File Number) Identification No.) incorporation) 32 CHERRY HILL DRIVE, DANVERS, MASSACHUSETTS 01923 --------------------------------------------------------------- (Address of principal executive offices) (Zip Code) Registrant's telephone number, including area code: (978) 777-4247 ITEM 5. OTHER EVENTS. On July 16, 2001, Ibis Technology Corporation publicly disseminated a press release announcing the installation and qualification of an Ibis 1000 implanter at Mitsubishi Materials Silicon Corporation (MSIL), creating an additional manufacturing source for SIMOX-SOI substrates. Mitsubishi purchased the implanter as part of a long-standing, strategic partnership with Ibis that includes a process licensing agreement covering certain Advantox(R) SIMOX-SOI wafers. In addition, Mitsubishi recently announced a licensing agreement for the use of IBM's proprietary SIMOX process for the production of Modified Low Dose (MLD) wafers. Originally purchased in 1998, the Ibis 1000 implanter has been operating within Ibis' Danvers facility until its recent shipment to Mitsubishi's Noda wafer manufacturing facility in Chiba, Japan. The information contained in the press release is incorporated herein by reference and filed as Exhibit 99.1 hereto. ITEM 7. FINANCIAL STATEMENTS AND EXHIBITS. (c) Exhibit. 99.1 Press Release dated July 16, 2001. SIGNATURES Pursuant to the requirements of the Securities Exchange Act of 1934, the Registrant has duly caused this report to be signed on its behalf by the undersigned hereunto duly authorized. IBIS TECHNOLOGY CORPORATION (Registrant) Date: July 17, 2001 /s/ Debra L. Nelson ---------------------------------------- Debra L. Nelson, Chief Financial Officer EXHIBIT INDEX EXHIBIT SEQUENTIAL NUMBER DESCRIPTION PAGE NUMBER 99.1 Press Release dated 5 July 16, 2001