Exhibit 23.1 CONSENT OF INDEPENDENT ACCOUNTANTS We hereby consent to the incorporation by reference in the Registration Statements on Form S-3 (Nos. 333-69721, 333-64519 and 333-60180) and Form S-8 (Nos. 33-90702, 33-90726, 33-90732, 333-3408, 333-25217, 333-41067, 333-45063, 333-74141, 333-49822 and 333-33894) of PRI Automation, Inc. of our report dated November 19, 2001 relating to the financial statements and financial statement schedule, which appears in this Form 10-K. PricewaterhouseCoopers LLP Boston, Massachusetts December 7, 2001