Exhibit 23.1


                       CONSENT OF INDEPENDENT ACCOUNTANTS


       We hereby consent to the incorporation by reference in this Registration
Statement on Form S-8 of our report dated November 19, 2001 relating to the
financial statements and financial statement schedule of PRI Automation, Inc.,
which appears in PRI Automation, Inc.'s Annual Report on Form 10-K for the year
ended September 30, 2001.


                                         /s/ PricewaterhouseCoopers LLP


Boston, Massachusetts
January 2, 2002