Exhibit 23.1 CONSENT OF INDEPENDENT ACCOUNTANTS We hereby consent to the incorporation by reference in this Registration Statement on Form S-8 of our report dated November 19, 2001 relating to the financial statements and financial statement schedule of PRI Automation, Inc., which appears in PRI Automation, Inc.'s Annual Report on Form 10-K for the year ended September 30, 2001. /s/ PricewaterhouseCoopers LLP Boston, Massachusetts January 2, 2002