<Page> EXHIBIT 11 IBIS TECHNOLOGY CORPORATION STATEMENT RE: COMPUTATION OF PER SHARE INCOME (LOSS) <Table> <Caption> Years Ended December 31, ------------------------------------------- 1999 2000 2001 ---- ---- ---- Basic net income (loss)........................... $ 827,129 $ (1,501,867) $ (9,594,919) ============== ============= ============= Weighted average common shares outstanding- basic........................................... 7,403,803 8,285,893 8,378,262 Net additional common shares upon assumed exercise of stock options and warrants.......... 414,348 -- -- -------------- ------------- ------------- Weighted average commons shares outstanding- diluted......................................... 7,818,151 8,285,893 8,378,262 -------------- ------------- ------------- Net income (loss) per common share Basic........................................... $ 0.11 $ (0.18) $ (1.15) ============== ============= ============= Diluted......................................... $ 0.11 $ (0.18) $ (1.15) ============== ============= ============= </Table>