EXHIBIT 22 ELECTRO SCIENTIFIC INDUSTRIES, INC. AND SUBSIDIARIES SUBSIDIARIES OF THE REGISTRANT AS OF MAY 31, 1995 PERCENTAGE OF STATE AND COUNTRY VOTING SECURITIES SUBSIDIARIES OF INCORPORATION OWNED (1) ------------ ----------------- ----------------- Chicago Laser Systems, Inc. Oregon 100% Palomar Systems, Inc. Oregon 100% CLS GmbH Germany 100% CLS Korea Korea 100% CLS Ltd England 100% ESI BV The Netherlands 100% ESI Foreign Sales Corporation Guam 100% ESI GmbH Germany 100% ESI International (DISC) Oregon 100% ESI KK Japan 100% ESI Ltd England 100% ESI SARL France 100% ESI SRL Italy 100% Oyang/ESI (Joint Venture) Korea 80% <FN> (1) Other than qualifying shares, where applicable. Page 47 of 48