<ARTICLE> 5 <CIK> 0000726514 <NAME> ELECTRO SCIENTIFIC INDUSTRIES, INC. <MULTIPLIER> 1,000 <PERIOD-TYPE> 12-MOS <FISCAL-YEAR-END> MAY-31-1995 <PERIOD-START> JUN-01-1994 <PERIOD-END> MAY-31-1995 <CASH> 11,385 <SECURITIES> 17,011 <RECEIVABLES> 33,630 <ALLOWANCES> 299 <INVENTORY> 25,478 <CURRENT-ASSETS> 91,169 <PP&E> 36,003 <DEPRECIATION> 20,387 <TOTAL-ASSETS> 110,598 <CURRENT-LIABILITIES> 15,080 <BONDS> 0 <COMMON> 49,762 <PREFERRED-MANDATORY> 0 <PREFERRED> 0 <OTHER-SE> 44,682 <TOTAL-LIABILITY-AND-EQUITY> 110,598 <SALES> 108,215 <TOTAL-REVENUES> 108,215 <CGS> 51,413 <TOTAL-COSTS> 51,413 <OTHER-EXPENSES> 40,743 <LOSS-PROVISION> 319 <INTEREST-EXPENSE> 62 <INCOME-PRETAX> 16,457 <INCOME-TAX> 4,940 <INCOME-CONTINUING> 0 <DISCONTINUED> 0 <EXTRAORDINARY> 0 <CHANGES> 0 <NET-INCOME> 11,517 <EPS-PRIMARY> 1.53 <EPS-DILUTED> 1.53