EXHIBIT 21 ELECTRO SCIENTIFIC INDUSTRIES, INC. AND SUBSIDIARIES SUBSIDIARIES OF THE REGISTRANT AS OF MAY 31, 1996 PERCENTAGE OF STATE AND COUNTRY VOTING SECURITIES SUBSIDIARIES OF INCORPORATION OWNED (1) - - ------------ ---------------- ---------------- AISI Merger Corp. Oregon 100% Chicago Laser Systems, Inc. Oregon 100% CHINT, Ltd. U.S. Virgin Islands 100% CLS GmbH Germany 100% CLS Ltd England 100% ESI BV The Netherlands 100% ESI Foreign Sales Corporation Guam 100% ESI GmbH Germany 100% ESI International (DISC) Oregon 100% ESI KK Japan 100% ESI Korea Korea 100% ESI Ltd England 100% ESI SARL France 100% ESI SRL Italy 100% Palomar Systems, Inc. Oregon 100% XRL, Corp. Oregon 100% (1) Other than qualifying shares, where applicable. Page 43 of 44