<ARTICLE> 5 <CIK> 0000726514 <NAME> ELECTRO SCIENTIFIC INDUSTRIES, INC. <MULTIPLIER> 1,000 <PERIOD-TYPE> YEAR <FISCAL-YEAR-END> MAY-31-1996 <PERIOD-START> JUN-01-1995 <PERIOD-END> MAY-31-1996 <CASH> 18,622 <SECURITIES> 18,363 <RECEIVABLES> 40,106 <ALLOWANCES> 314 <INVENTORY> 30,167 <CURRENT-ASSETS> 111,647 <PP&E> 38,853 <DEPRECIATION> 22,191 <TOTAL-ASSETS> 132,525 <CURRENT-LIABILITIES> 17,609 <BONDS> 0 <PREFERRED-MANDATORY> 0 <PREFERRED> 0 <COMMON> 55,790 <OTHER-SE> 59,126 <TOTAL-LIABILITY-AND-EQUITY> 132,525 <SALES> 159,705 <TOTAL-REVENUES> 159,705 <CGS> 72,754 <TOTAL-COSTS> 72,754 <OTHER-EXPENSES> 62,101 <LOSS-PROVISION> 0 <INTEREST-EXPENSE> 7 <INCOME-PRETAX> 25,316 <INCOME-TAX> 9,234 <INCOME-CONTINUING> 0 <DISCONTINUED> 0 <EXTRAORDINARY> 0 <CHANGES> 0 <NET-INCOME> 16,082 <EPS-PRIMARY> 1.87 <EPS-DILUTED> 1.87