EXHIBIT 21 SUBSIDIARIES OF THE REGISTRANT SUBSIDIARY STATE OR OTHER ---------- JURISDICTION OF OPERATION ------------------------- LAM RESEARCH GMBH GERMANY LAM RESEARCH CO., LTD. JAPAN (KANAGAWA) LAM RESEARCH CO., LTD. JAPAN (SAITAMA) LAM RESEARCH (SHANGHAI) CO., LTD CHINA LAM RESEARCH LTD. UNITED KINGDOM LAM RESEARCH SARL FRANCE LAM RESEARCH SINGAPORE PTE LTD SINGAPORE LRC INTERNATIONAL FSC CORPORATION BARBADOS LAM RESEARCH KOREA LIMITED KOREA LAM RESEARCH S.R.L. ITALY LAM RESEARCH (ISRAEL) LTD. ISRAEL LAM RESEARCH CO., LTD. TAIWAN LAM RESEARCH BV NETHERLANDS MONKOWSKI-RHINE, INCORPORATED CALIFORNIA 24