EXHIBIT 23.01

                         Consent of Independent Auditors



     We consent to the reference to our firm under the caption  "Experts" in the
Registration  Statement  pertaining  to the 1987 Stock Option Plan (Form S-8 No.
33-77060)  and the  Registration  Statement  pertaining to the 1995 Stock Option
Plan (Form S-8 No. 33-93048) of Advanced Technology  Materials,  Inc. and to the
incorporation  by reference  therein of our report dated February 14, 1997, with
respect to the  consolidated  financial  statements  and  schedule  of  Advanced
Technology  Materials,  Inc.  included in its Annual  Report (Form 10-K) for the
year ended December 31, 1996, filed with the Securities and Exchange Commission.







ERNST & YOUNG LLP


Stamford, Connecticut
March  26, 1997