SECOND AMENDMENT TO
                          AGREEMENT AND PLAN OF MERGER

     This SECOND  AMENDMENT TO AGREEMENT  AND PLAN OF MERGER is dated as of July
30,  1997,  by  and  among  ADVANCED  TECHNOLOGY  MATERIALS,  INC.,  a  Delaware
corporation ("Buyer"), WELK ACQUISITION CORPORATION,  a Delaware corporation and
a  wholly-owned  subsidiary  of Buyer  ("Buyer  Sub"),  ATMI  HOLDINGS,  INC., a
Delaware corporation and wholly-owned  subsidiary of Buyer ("Holdings") LAWRENCE
SEMICONDUCTOR  LABORATORIES,  INC., an Arizona corporation ("LSL"), and LAWRENCE
SEMICONDUCTOR  LABORATORIES  MARKETING AND SALES,  INC., an Arizona  corporation
("LSLMS"; LSL and LSLMS are referred to collectively as "Lawrence");  and all of
the  parties are  referred to  collectively  as the  "Companies."  Buyer Sub and
Lawrence are referred to  collectively  as the  "Constituent  Corporations"  and
individually as a "Constituent Corporation."

     The  Companies  are parties to that  certain  Agreement  and Plan of Merger
dated May 17,  1997,  as amended by First  Amendment  to  Agreement  and Plan of
Merger  dated June 6, 1997 (as  amended,  the "Merger  Agreement"),  and wish to
amend  further the Merger  Agreement  in order to limit the time period in which
certain claims for indemnification may be made.

     In  consideration  of the  foregoing  and the  respective  representations,
warranties,  covenants and  agreements  set forth  herein,  the parties agree as
follows:

     1. Capitalized  terms not otherwise  defined herein shall have the meanings
provided in the Merger Agreement.

     2. Section 10.1(f) is hereby amended to insert the following as a new final
sentence:  "Notwithstanding  the foregoing or anything in this  Agreement to the
contrary,  no  claim  seeking  indemnification  from  the  Shareholders  or  the
Indemnification  Escrow may be brought  after the date of  issuance of the first
independent audit report with respect to the financial statements of Buyer (or

     Holdings,  if the  closing  of the  transactions  contemplated  by the ADCS
Merger  Agreement  shall  occur on or  before  the  Effective  Time)  after  the
Effective  Time if such claim is of a type  expected  to be  encountered  in the
course of an audit  performed in accordance  with  generally  accepted  auditing
standards."

     3.  Section 10.3 is hereby  amended to insert the  following as a new final
sentence:  "Notwithstanding  the foregoing or anything in this  Agreement to the
contrary,  no claim seeking  indemnification from Buyer may be brought after the
date of  issuance of the first  independent  audit  report  with  respect to the
financial  statements of Buyer (or Holdings,  if the closing of the transactions
contemplated by the ADCS Merger Agreement shall occur on or before the Effective
Time)  after  the  Effective  Time if such  claim  is of a type  expected  to be
encountered  in the course of an audit  performed in accordance  with  generally
accepted auditing standards."

     4.  Section  5(d) of the form of Escrow  Agreement  attached  to the Merger
Agreement as Exhibit D is hereby  amended to insert the following as a new final
sentence:  "Notwithstanding  the foregoing or anything in this  Agreement to the
contrary,  no  claim  seeking  indemnification  from  the  Shareholders  or  the
Indemnification  Escrow may be brought  after the date of  issuance of the first
independent  audit report with respect to the financial  statements of Buyer (or
Holdings,  if the closing of the  transactions  contemplated  by the ADCS Merger
Agreement  shall occur on or before the Effective Time) after the Effective Time
if such claim is of a type expected to be  encountered in the course of an audit
performed in accordance with generally accepted auditing standards."

     5. Except as modified  herein,  the  Agreement as  originally  executed and
previously  amended is hereby  ratified and affirmed and  acknowledged to be the
legal, valid and binding obligations of each of the parties hereto.

     6. This Amendment shall be governed by and construed in accordance with the
laws of the State of New York without  giving effect to the  provisions  thereof
relating to conflicts of law.

     7. This  Amendment  may be  executed in two or more  counterparts,  each of
which shall be deemed to be an original  but all of which shall  constitute  one
and the same agreement.





     IN WITNESS  WHEREOF,  each of Buyer,  Buyer Sub,  Holdings and Lawrence has
caused this  Amendment  to be executed on its behalf by its  officers  thereunto
duly authorized, all as of the date first above written.

Advanced Technology Materials, Inc.,
a Delaware corporation


By: /s/ Daniel P. Sharkey
- ---------------------------------
Name: Daniel P. Sharkey
Title: Vice President, Chief
Financial Officer

Welk Acquisition Corporation, a
Delaware corporation


By: /s/ Daniel P. Sharkey
- ---------------------------------
Name: Daniel P. Sharkey
Title: President

ATMI Holdings, Inc., a Delaware
corporation


By: /s/ Daniel P. Sharkey
- ---------------------------------
Name: Daniel P. Sharkey
Title: Treasurer

Lawrence Semiconductor Laboratories,
Inc., an Arizona corporation


By: /s/ Lamonte H. Lawrence
- ---------------------------------
Name: Lamonte H. Lawrence
Title: Chief Executive Officer

Lawrence Semiconductor Laboratories
Marketing and Sales, Inc., an
Arizona corporation


By: /s/ Lamonte H. Lawrence
- ---------------------------------
Name: Lamonte H. Lawrence
Title: Chief Executive Officer


     On May 30, 1997,  the Company filed a Current  Report on Form 8-K dated May
17, 1997  reporting  in Item 5 thereof the  execution  of the LSL  Agreement  to
acquire  all of the issued and  outstanding  equity  interests  in LSL.  The LSL
Agreement is subject to shareholder approval and other customary conditions.