================================================================================


                                  UNITED STATES
                       SECURITIES AND EXCHANGE COMMISSION
                             WASHINGTON, D.C. 20549


                                ________________

                                    FORM 10-Q
                                ________________


      (Mark One)

           [X]   QUARTERLY REPORT PURSUANT TO SECTION 13 OR 15(D)
                 OF THE SECURITIES EXCHANGE ACT OF 1934

                  FOR THE QUARTERLY PERIOD ENDED JUNE 30, 2003

                               OR

           [ ]   TRANSITION REPORT PURSUANT TO SECTION 13 OR 15(D)
                 OF THE SECURITIES EXCHANGE ACT OF 1934

                         COMMISSION FILE NUMBER: 0-26824

                                TEGAL CORPORATION
             (EXACT NAME OF REGISTRANT AS SPECIFIED IN ITS CHARTER)

                DELAWARE                                68-0370244
      (STATE OR OTHER JURISDICTION OF       (I.R.S. EMPLOYER IDENTIFICATION NO.)
      INCORPORATION OR ORGANIZATION)

                            2201 SOUTH MCDOWELL BLVD.
                           PETALUMA, CALIFORNIA 94954
                    (Address of Principal Executive Offices)

                         TELEPHONE NUMBER (707) 763-5600
              (Registrant's Telephone Number, Including Area Code)

                                ________________


    Indicate  by check mark  whether the  registrant:  (1) has filed all reports
required to be filed by Section 13 or 15(d) of the  Securities  Exchange  Act of
1934  during  the  preceding  12 months  (or for such  shorter  period  that the
registrant was required to file reports) and (2) has been subject to such filing
requirements for the past 90 days. Yes [X] No [ ]

Indicate by check mark whether the registrant is an accelerated filer (as
defined in Rule 12b-2 of the Exchange List. Yes [ ] No [X]

    As of July 25,  2003,  there  were  16,099,949  shares of our  common  stock
outstanding.

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                                       1




                       TEGAL CORPORATION AND SUBSIDIARIES

                                      INDEX


<table>


                          PART I. FINANCIAL INFORMATION
                                                                                                                         
                                                                                                                               PAGE
ITEM 1.      CONDENSED CONSOLIDATED FINANCIAL STATEMENTS (Unaudited)
             Condensed Consolidated Balance Sheets as of June 30, 2003 and March 31, 2003...................................     3
             Condensed Consolidated Statements of Operations-- for the three months ended June 30, 2003 and 2002............     4
             Condensed Consolidated Statements of Cash Flows-- for the three months ended June 30, 2003 and 2002............     5
             Notes to Condensed Consolidated Financial Statements...........................................................     6
ITEM 2.      MANAGEMENT'S DISCUSSION AND ANALYSIS OF FINANCIAL CONDITION AND RESULTS
             OF OPERATIONS..................................................................................................    11
ITEM 3.      QUANTITATIVE AND QUALITATIVE DISCLOSURES ABOUT MARKET RISK.....................................................    13
ITEM 4.      CONTROLS AND PROCEDURES........................................................................................    13

                           PART II. OTHER INFORMATION

ITEM 1.      LEGAL PROCEEDINGS...............................................................................................   15
ITEM 4.      SUBMISSION OF MATTERS TO A VOTE OF SECURITY HOLDERS.............................................................   15
ITEM 5.      OTHER INFORMATION...............................................................................................   15
ITEM 6.      EXHIBITS AND REPORTS ON FORM 8-K................................................................................   23
SIGNATURES.................................................................................................................     24





                                       2




                         PART I -- FINANCIAL INFORMATION

ITEM 1. CONDENSED CONSOLIDATED FINANCIAL STATEMENTS

                       TEGAL CORPORATION AND SUBSIDIARIES
                      CONDENSED CONSOLIDATED BALANCE SHEETS
                                   (UNAUDITED)
                                 (IN THOUSANDS)





                                     ASSETS

                                                                                                                 JUNE 30,  MARCH 31,
                                                                                                                   2003      2003
                                                                                                                 -------   --------
Current assets:
                                                                                                                    
  Cash and cash equivalents................................................................................    $    1,162 $     912
  Trade receivables, net...................................................................................         3,975     2,681
  Other receivable.........................................................................................           505        --
  Inventories..............................................................................................         6,163     7,032
  Prepaid expenses and other current assets................................................................           880       465
                                                                                                                ---------  ---------
      Total current assets.................................................................................        12,685    11,090
Property and equipment, net................................................................................         4,628     4,916
Intangible assets, net.....................................................................................           927       959
Other assets...............................................................................................           218       244
                                                                                                               ----------  ---------
      Total assets.........................................................................................    $   18,458 $  17,209
                                                                                                               ==========  =========
                      LIABILITIES AND STOCKHOLDERS' EQUITY
Current liabilities:
  Notes payable............................................................................................    $      472 $     389
   Convertible debentures, net ............................................................................           215        --
  Accounts payable.........................................................................................         2,198     1,923
  Product warranty.........................................................................................           751       734
  Customer deposits........................................................................................           700        --
  Accrued expenses and other current liabilities...........................................................         2,873     2,679
  Deferred revenue.........................................................................................           535       324
                                                                                                                ---------  ---------
      Total current liabilities............................................................................         7,744     6,049
Long-term portion of capital lease obligation..............................................................            36        37
                                                                                                                ---------  ---------
      Total liabilities....................................................................................         7,780     6,086
                                                                                                                ---------  ---------
Stockholders' equity:
  Common stock.............................................................................................           161       161
  Additional paid-in capital...............................................................................        69,651    68,806
  Accumulated other comprehensive income...................................................................           428       465
  Accumulated deficit......................................................................................       (59,562)  (58,309)
                                                                                                                ---------  --------
      Total stockholders' equity...........................................................................        10,678    11,123
                                                                                                                ---------  --------
                                                                                                               $   18,458 $  17,209
                                                                                                                =========  ========


                             See accompanying notes.





                                       3






                       TEGAL CORPORATION AND SUBSIDIARIES
                 CONDENSED CONSOLIDATED STATEMENTS OF OPERATIONS
                                   (UNAUDITED)
                      (IN THOUSANDS, EXCEPT PER SHARE DATA)




                                                                                                                 THREE MONTHS ENDED
                                                                                                                      JUNE 30,
                                                                                                                 ------------------
                                                                                                                  2003        2002
                                                                                                                  ----        ----
Revenue:
                                                                                                                     
    Product................................................................................................   $    3,542   $  3,295
    Services...............................................................................................          343        427
                                                                                                               ---------    -------
      Total revenue........................................................................................        3,885      3,722
Cost of sales:
    Cost of product........................................................................................        2,492      2,855
    Cost of services.......................................................................................          356        664
                                                                                                               ---------    --------
      Total cost of sales..................................................................................        2,848      3,519
                                                                                                               ---------    -------
      Gross profit.........................................................................................        1,037        203
                                                                                                               ---------    -------
Operating expenses:
  Research and development.................................................................................          703      1,276
  Sales and marketing......................................................................................          612        659
  General and administrative...............................................................................        1,036      1,053
                                                                                                                --------    -------
      Total operating expenses.............................................................................        2,351      2,988
                                                                                                                --------    -------
      Operating loss.......................................................................................       (1,314)    (2,785)
Other income (expense), net................................................................................           60        (61)
                                                                                                                --------    -------
      Net loss.............................................................................................   $   (1,254)  $ (2,846)
                                                                                                                ========    =======
Net loss per share, basic and diluted......................................................................   $    (0.08)  $  (0.20)
                                                                                                                ========    =======
Shares used in per share computations:
  Basic....................................................................................................       16,092     14,311
  Diluted..................................................................................................       16,092     14,311

                             See accompanying notes.




                                       4




                       TEGAL CORPORATION AND SUBSIDIARIES
                 CONDENSED CONSOLIDATED STATEMENTS OF CASH FLOWS
                                   (UNAUDITED)
                                 (IN THOUSANDS)



                                                                                                                 THREE MONTHS ENDED
                                                                                                                      JUNE 30,
                                                                                                                 ------------------
                                                                                                                  2003        2002
                                                                                                                  ----        ----
                                                                                                                        

Cash flows from operating activities:
  Net loss.................................................................................................     $ (1,254)  $ (2,846)
Adjustments to reconcile net loss to cash used in operating activities:
    Depreciation and amortization..........................................................................          338        180
    Allowance for doubtful accounts and sales return allowances............................................           60        (19)
      Issuance of options for services rendered............................................................           32         --
    Changes in operating assets and liabilities:
      Receivables..........................................................................................       (1,411)       (11)
      Inventories..........................................................................................          905      1,035
      Prepaid expenses and other assets....................................................................         (166)       507
      Accounts payable.....................................................................................          275         (2)
      Accrued expenses and other liabilities...............................................................          835        (95)
      Deferred revenue.....................................................................................          209       (724)
                                                                                                                 -------    -------
        Net cash used in operating activities..............................................................         (177)    (1,975)
                                                                                                                 -------    -------
Cash flows from investing activities:......................................................................
     Purchases of property and equipment...................................................................          (17)       (18)
                                                                                                                 -------    -------
        Net cash used in investing activities..............................................................          (17)       (18)
                                                                                                                 -------    -------
Cash flows from financing activities:
  Proceeds from the issuance of convertible debentures.....................................................          424         --
  Borrowings under lines of credit.........................................................................          178      2,127
  Repayment of borrowings under lines of credit............................................................          (92)    (2,499)
  Payments on capital lease financing......................................................................           (2)       (21)
                                                                                                                 -------    -------
        Net cash (used in) provided by financing activities................................................          508       (393)
                                                                                                                 -------    -------
Effect of exchange rates on cash and cash equivalents......................................................          (64)        35
                                                                                                                 -------    -------
Net decrease in cash and cash equivalents..................................................................          250     (2,351)
Cash and cash equivalents at beginning of period...........................................................          912      8,100
                                                                                                                 -------    -------
Cash and cash equivalents at end of period.................................................................     $  1,162   $  5,749
                                                                                                                 =======    =======




                             See accompanying notes.



                                       5




                       TEGAL CORPORATION AND SUBSIDIARIES

              NOTES TO CONDENSED CONSOLIDATED FINANCIAL STATEMENTS
                                   (UNAUDITED)
                  (ALL AMOUNTS IN THOUSANDS, EXCEPT SHARE DATA)

1. BASIS OF PRESENTATION:

     In the opinion of management,  the unaudited condensed consolidated interim
financial  statements have been prepared on the same basis as the March 31, 2003
audited   consolidated   financial   statements  and  include  all  adjustments,
consisting only of normal recurring  adjustments,  necessary to fairly state the
information  set forth herein.  The statements  have been prepared in accordance
with the regulations of the Securities and Exchange  Commission (the "SEC"), but
omit  certain  information  and  footnote  disclosures  necessary to present the
statements in accordance with generally accepted  accounting  principles.  These
interim financial statements should be read in conjunction with the consolidated
financial statements and footnotes included in the Annual Report on Form 10-K of
Tegal  Corporation (the "Company") for the fiscal year ended March 31, 2003. The
results  of  operations  for the  three  months  ended  June  30,  2003  are not
necessarily indicative of results to be expected for the entire year.

     The consolidated financial statements contemplate the realization of assets
and the  satisfaction  of  liabilities  in the normal  course of  business.  The
Company  incurred  net losses of $1.3  million and $2.8  million for the periods
ended June 30, 2003 and 2002,  respectively,  generated negative cash flows from
operations of $0.2 million and $2.0 million in these periods, and has a cash and
cash  equivalents  balance  of $1.2  million  at June  30,  2003,  which  raises
substantial  doubt about its ability to continue as a going concern.  Management
believes  that its responses to the unfolding  business  climate,  including the
recent  staff  reduction,   and  the  Company's  currently  available  financial
resources,  including cash on hand, will be adequate to fund operations  through
fiscal year 2004.  The Company  raised  $0.9  million  from the first stage of a
private  placement of  convertible  debentures and warrants on June 30, 2003. In
addition,  the Company expects to complete the second stage of this  convertible
debt financing in September 2003,  contingent  upon  stockholder  approval.  The
second stage of the  financing,  involving  the private  placement of additional
convertible debentures and warrants to the same investors as the first stage, if
completed,  will result in gross  proceeds to the Company of $6.2 million.  (See
Note 9.) However,  there is no  assurance  that the  stockholders  of Tegal will
approve the second  stage of this  financing,  and there is no  assurance,  that
additional financing,  if required,  will be available on reasonable terms or at
all.

CONCENTRATION OF CREDIT RISK

    Financial  instruments that  potentially  subject the Company to significant
concentrations  of credit risk consist  primarily of temporary cash  investments
and  accounts   receivable.   Substantially  all  of  the  Company's   temporary
investments  are invested in highly  liquid money market  funds.  The  Company's
accounts receivable are derived primarily from sales to customers located in the
U.S.,  Europe,  and Asia. The Company performs ongoing credit evaluations of its
customers and generally  requires no collateral.  The Company maintains reserves
for potential credit losses.  Write-offs  during the periods presented have been
insignificant.  As of June 30, 2003 and June 30, 2002 one customer accounted for
approximately  49  percent  and  15  percent,   respectively,  of  the  accounts
receivable balance.

    During the quarter ended June 20, 2003 one customer accounted for 49 percent
of  total  revenues.  During  the  quarter  ended  June 20,  2002 two  customers
accounted for 21 percent and 10 percent of total revenues.

2. INVENTORIES:

    Inventories consisted of:

                                                          JUNE 30,    MARCH 31,
                                                            2003        2003
                                                         ---------   ----------
    Raw materials.....................................   $   3,072  $   3,218
    Work in progress..................................       1,466      1,937
    Finished goods and spares.........................       1,625      1,877
                                                          --------   --------
                                                         $   6,163  $   7,032
                                                          ========   ========



                                       6


3. PRODUCT WARRANTY:
    The Company  provides  warranty on all system  sales based on the  estimated
cost of product  warranties  at the time  revenue is  recognized.  The  warranty
obligation is affected by product failure rates,  material usage rates,  and the
efficiency  by which the product  failure is corrected.  Should  actual  product
failure  rates,   material  usage  rates  and  labor  efficiencies  differ  from
estimates, revisions to the estimated warranty liability may be required.

    Warranty  activity for the  three-month  period ended June 30, 2003 and 2002
was:



                                                                                         WARRANTY ACTIVITY  WARRANTY ACTIVITY
                                                                                           FOR THE THREE      FOR THE THREE
                                                                                            MONTHS ENDED       MONTHS ENDED
                                                                                           JUNE 30, 2003      JUNE 30, 2002
                                                                                           -------------      -------------
                                                                                                         
      Balance at the beginning of the period...........................................     $     734          $   1,205
      Additional warranty accruals for warranties issued during the period.............           120                167
      Accruals related to pre-existing warranties......................................            --                 --
      Settlements made during the period...............................................          (103)              (234)
                                                                                             --------           --------
      Balance at the end of the period.................................................     $     751          $   1,138
                                                                                             ========           ========


    Certain of the Company's  sales  contracts  include  provisions  under which
customers  would be  indemnified  by the  Company in the event of,  among  other
things,  a  third-party  claim  against the customer for  intellectual  property
rights infringement related to the Company's products.  There are no limitations
on the maximum potential future payments under these guarantees. The Company has
accrued no amounts in relation to these  provisions  as no such claims have been
made  and  the  Company  believes  it  has  valid,  enforceable  rights  to  the
intellectual property embedded in its products.

4. NET LOSS PER COMMON SHARE:

     Basic  earnings  per share  ("EPS") is  calculated  by dividing  net income
(loss) for the period by the weighted average common shares outstanding for that
period.  Diluted EPS takes into account the number of  additional  common shares
that  would  have been  outstanding  if the  dilutive  potential  common  shares
("common stock equivalents") had been issued.

     Common stock  equivalents for the three months ended June 30, 2003 and 2002
were 3,235,736 and 31,898, respectively, and have been excluded from shares used
in   calculating   diluted  loss  per  share   because  their  effect  would  be
antidilutive.  The common stock  equivalents for the three months ended June 30,
2003 included 3,186,657 of potential dilutive shares arising from the first step
of the convertible  debenture  financing,  assuming conversion of the debentures
into common shares and exercise of related warrants. (See Note 9.)



                                       7


5. STOCK-BASED COMPENSATION:

     The  Company  accounts  for  stock-based  employee  compensation  under the
recognition and measurement  principles of Accounting  Principles  Board Opinion
No. 25,  Accounting  for Stock  Issued to  Employees,  (APB No. 25) and  related
interpretations. Under APB No. 25, compensation cost is equal to the difference,
if any, on the date of grant between the fair value of the  Company's  stock and
the amount an employee must pay to acquire the stock.  SFAS No. 123,  Accounting
for Stock-based Compensation, established accounting and disclosure requirements
using  a  fair  value  based  method  of  accounting  for  stock-based  employee
compensation  plans.  As allowed by SFAS No.  123,  the  Company  has elected to
continue to apply the  intrinsic  value  based  method of  accounting  described
above,  and has adopted the disclosure  requirements of SFAS No. 123 and related
SFAS  No.  148,  Accounting  for  Stock-Based   Compensation  -  Transition  and
Disclosure.


     The  following  table  illustrates  the effect on net income (loss) and net
income  (loss) per share if the Company  had applied the fair value  recognition
provisions of SFAS No. 123 to stock-based compensation (in thousands, except per
share data):


                                                                                       THREE MONTHS ENDED
                                                                                            JUNE 30,
                                                                                       ------------------
                                                                                      2003           2002
                                                                                      ----           ----
                                                                                            
     Net loss as reported....................................................      $     (1,254)  $    (2,846)
     Add:  Stock-based employee compensation expense included in
         reported net loss, net of related tax effects.......................                --           --
     Deduct:  Total stock-based employee compensation expense                               (36)         (101)
         determined under fair value method for all awards, net of tax.......
     Proforma net loss.......................................................     $      (1,290) $     (2,947)
                                                                                   ============   ===========
     Basic net loss per share:...............................................
     As reported.............................................................             (0.08)        (0.20)
                                                                                   ============   ===========
     Proforma................................................................             (0.08)        (0.21)
                                                                                   ============   ===========


     The Company accounts for stock-based employee compensation arrangements in
accordance with Accounting Principles Board Opinion No. 25, Accounting for Stock
Issued to Employees, (APB No. 25) and related interpretations, and complies with
the disclosure provisions of SFAS No. 123, Accounting for Stock-based
Compensation and SFAS No. 148 Accounting for Stock-Based Compensation -
Transition and Disclosure. The disclosure provisions of SFAS No. 123 and SFAS
No. 148 require judgments by management as to the estimated lives of the
outstanding options. Management has based the estimated life of the options on
historical option exercise patterns. If the estimated life of the options
increases, the valuation of the options will increase as well.

     In June 2003, the Company  issued stock options to purchase  300,000 shares
of the Company's common stock to the landlord of its Petaluma facility,  as part
of a new lease agreement, and options to purchase 60,000 shares of the Company's
common stock to a service  provider for  services  rendered.  The options to the
landlord  were valued at $0.1  million  (included in other assets as of June 30,
2003)  using the  Black-Scholes  model and the value of the option was  expensed
immediately. The deferred charge associated with the landlord's options is being
amortized  to  operating  expense over the life of the new lease of seven years.
Expense  related to both of these  transactions  for the quarter  ended June 30,
2003 amounted to thirty-two thousand dollars.

6. LINES OF CREDIT:

     On June 30, 2003 the Company  entered into an Amended Letter  Agreement and
Subordination  Agreement with Silicon Valley Bank, which subordinated the bank's
interest in Tegal's  intellectual  property to the investors in the  Convertible
Debt Financing (See Note 9). The Company agreed not to request,  until such time
as the investors' security interest in the intellectual property was terminated,
any loan, letter of credit,  foreign exchange forward contract,  cash management
service or credit  accommodation under the Company's current line of credit with
Silicon  Valley Bank. At June 30, 2003,  the Company had no amounts  outstanding
under  this  domestic  line  of  credit,   which  had  been   collateralized  by
substantially all of the Company's domestic assets and which was further limited
by the amounts of accounts  receivable and inventories on the balance sheet. The
facility had a maximum borrowing capacity of $10.0 million, and bore interest at
prime plus 1.0  percent,  or 5.25  percent as of June 30,  2003.  The Company is
currently  negotiating with Silicon Valley Bank to modify this line of credit to
allow renewed  borrowing at  substantially  the same terms and  conditions,  but
including the receivables of its Japanese subsidiary.

     As of June 30, 2003, the Company's  Japanese  subsidiary had  approximately
$0.2 million  outstanding  under its bank line of credit which is collateralized
by Japanese  customer  promissory  notes held by such  subsidiary  in advance of
payment on customers' accounts
                                       8


receivable.  The  Japanese  bank line bears  interest at Japanese  prime  (1.375
percent as of June 30, 2003) plus 1.0  percent,  has a renewal date of September
30,  2003,  and has a total  capacity  of 150 million  yen  (approximately  $1.3
million at exchange rates prevailing on June 30, 2003).

     Notes  payable as of June 30,  2003  consisted  of two  outstanding  notes,
including  one to the  California  Trade and  Commerce  Agency and  another to a
retiring  officer of Sputtered  Films,  Inc. for $0.2 million and $0.1  million,
respectively.  The unsecured note from the California  Trade and Commerce Agency
carries an annual  interest  rate of 5.75  percent with  monthly  interest  only
payments of  approximately  forty-two  hundred  dollars per month.  Although the
payment  deadlines are being met, the note is currently in technical default due
to the merger of Sputtered Films and Tegal Corporation.  The unsecured note from
the retiring officer of Sputtered Films, Inc. carries an annual interest rate of
10.0 percent.

     The Company also entered into a Convertible  Debenture Financing,  which is
described in Note 9 to the financial statements.

7. COMPREHENSIVE INCOME (LOSS):

    The components of comprehensive loss for the three-month  periods ended June
30, 2003 and 2002 are as follows:



                                                                                                  THREE MONTHS
                                                                                                      ENDED
                                                                                                    JUNE 30,
                                                                                                    --------
                                                                                                  2003     2002
                                                                                                  ----     ----
                                                                                                   
                  Net loss..................................................................   $  1,254  $  2,846
                  Foreign currency translation adjustment...................................         37       (62)
                                                                                                -------   -------
                                                                                               $  1,291  $  2,784
                                                                                                =======   =======


8. ACQUISITION:

     On  August  30,  2002,  the  Company  acquired  Sputtered  Films,  Inc.,  a
California corporation  ("Sputtered Films") pursuant to an Agreement and Plan of
Merger  Agreement  dated  August 13,  2002.  Sputtered  Films is a leader in the
design and  manufacture of sputtering  equipment for  semiconductor,  photomask,
advanced   packaging   (including   flip   chip)  and   compound   semiconductor
applications.  The  acquisition  of  Sputtered  Films  secured  a  source  for a
complementary deposition technology for The Company's new materials strategy.

     The following unaudited proforma financial results of Tegal Corporation and
Sputtered  Films for the three  months  ended June 30,  2002 give  effect to the
acquisition of Sputtered  Films as if the  acquisition had occurred on the first
day of the  quarter  ended  June  30,  2002  and  includes  adjustments  such as
amortization of intangible assets directly attributable to the acquisition,  and
expected to have a continuing impact on the combined company.

     The  unaudited  proforma  financial  results for the quarter ended June 30,
2002  are  provided  for  comparative  purposes  only  and are  not  necessarily
indicative of what the Company's actual results would have been had the forgoing
transaction  been  consummated  on April 1, 2002, nor does it give effect to the
synergies,   cost  savings  and  other  charges  expected  to  result  from  the
acquisition.  Accordingly,  the proforma  financial results do not purport to be
indicative of the  Company's  results of operations as of the date hereof or for
any period ended on the date hereof or for any other future date or period.

     Unaudited actual and proforma financial  Information (in thousands,  except
share and per share amounts):



                                                                                THREE MONTHS ENDED
                                                                                     JUNE 30,
                                                                                ------------------
                                                                                 2003         2002
                                                                                --------    ------
                                                                                           (PROFORMA)
                                                                                            --------
                                                                                    
               Revenue....................................................   $     3,885  $     5,306
               Net loss...................................................        (1,254)      (2,990)
               Net loss per share, basic and diluted......................         (0.08)       (0.19)
               Shares used in per share computations:
                  Basic & diluted.........................................        16,092       15,811



                                       9


9.       CONVERTIBLE DEBENTURE FINANCING:

     On June 30, 2003, the Company signed  definitive  agreements with investors
to raise up to $7.2 million in a private placement of convertible debt financing
to be  completed  in two steps.  The first step,  which closed on June 30, 2003,
involved the sale of  debentures in the  principal  amount of $0.9 million.  The
Company received $0.4 million in cash on June 30, 2003 and the remaining balance
of $0.5  million on July 1, 2003 which was  recorded as other  receivable  as of
June 30, 2003.  The closing of the second step,  which will make  available  the
balance of the  financing of  approximately  $6.2 million,  is  contingent  upon
stockholder approval.

     The debentures agreement includes a Material Adverse Change ("MAC") clause,
which  allows  the  debenture  holders to demand  the  immediate  payment of all
outstanding balances upon the debenture holders' determination of the occurrence
of  deemed  material  adverse  changes  to the  Company's  financial  condition,
business  or  operations  as  determined  by the  debenture  holders.  Potential
material adverse changes that may cause the Company to default on the debentures
include any  significant  adverse  effect on the Company's  financial  condition
arising from an event not previously disclosed in the Company's filings with the
Securities  and Exchange  Commission  ("SEC") such as a  significant  litigation
judgment  against the Company,  bankruptcy,  termination  of the majority of the
Company's customer  relationships or failure to obtain stockholder  approval for
the second step of the debenture  financing.  The MAC clause is effective  until
the conversion of all outstanding debentures.

         As a result of the MAC  clause,  the  debentures  are  classified  as a
current liability.

     The Company is obligated to use  reasonable  efforts to register the shares
issuable upon the  conversion of the  debentures  and exercise of warrants.  The
Company  would be subject to  liquidated  damages equal to a monthly 1.5% of the
aggregate  amount of the  debentures in case the Company did not use  reasonable
efforts to cause a  registration  statement to be filed with the SEC by July 30,
2003. Such registration statement was filed with the SEC on July 29, 2003.

     The  Company  is  required  to pay a cash fee of up to  6.65% of the  gross
proceeds of the debentures to certain financial advisors upon the closing of the
second step of the  debenture  financing  which is contingent  upon  stockholder
approval.

     The  debentures  accrue  interest  at the  rate  of 2% per  annum  and  are
convertible  at the rate of $0.35 per share.  The first step  financing  of $0.9
million is convertible  into 2,655,554 shares of the Company's common stock. The
closing price of the Company's  common stock on June 30, 2003,  the closing date
for the first step, was $0.55. Therefore, a beneficial conversion feature exists
which has been accounted for under the provisions of EITF 00-27,  Application of
Issue 98-5 to Certain Convertible Instruments.

     In  addition,  the  debenture  holders  were  granted  warrants to purchase
531,103 shares of the Company's  common stock at an exercise price of $0.50. The
warrants  expire  after  eight  years.   The  warrants  were  valued  using  the
Black-Scholes model with the following variables:  fair value of common stock of
$0.35, volatility of 37% and risk-free interest rate of 2.5%.

     The  relative  fair  value  of the  warrants  of  $0.06  million  has  been
classified as equity because it meets all the equity classification  criteria of
EITF 00-19,  Accounting for  Derivative  Financial  Instruments  Indexed to, and
Potentially Settled in, a Company's Own Stock.

     The  following  table  presents  the amounts  allocated  to the  beneficial
conversion  feature and warrants and remaining  balance of debt after accounting
for these two equity instruments (in thousands):

     Debentures - principal amount..............................   $       929
     Beneficial conversion feature (included in equity) ........          (653)
     Warrants (included in equity)..............................           (61)
     Net amount of debentures (classified as short term debt: ..   $       215


      The  issuance  costs  associated  with the  debentures  amounted  to $0.13
million and have been  recorded as a short-term  asset to be amortized  over the
life of the debt.

      The value of the beneficial conversion feature, warrants and debt issuance
costs will be amortized as interest  expense over the life of the debt using the
effective  interest  method.  Such  amortization  will accelerate if the Company
repays the debt early, if the material adverse change clause is invoked or if it
is deemed  that such  invocation  is  probable  given the  presence  of negative
factors or

                                       10


if the debt is  converted  into  common  stock.  The  Company  will  assess  the
probability  of the  occurrence  of the  material  adverse  change  clause  on a
quarterly basis.




                                       11





ITEM 2. MANAGEMENT'S DISCUSSION AND ANALYSIS OF FINANCIAL CONDITION AND RESULTS
        OF OPERATIONS

     Information herein contains "forward-looking statements" within the meaning
of the Private Securities Litigation Reform Act of 1995, which can be identified
by the use of  forward-looking  terminology  such as  "may,"  "will,"  "expect,"
"anticipate,"  "estimate,"  or  "continue"  or the  negative  thereof  or  other
variations  thereon or  comparable  terminology  or which  constitute  projected
financial  information.  The forward-looking  statements relate to the near-term
semiconductor capital equipment industry outlook,  demand for our products,  our
quarterly  revenue and earnings  prospects  for the  near-term  future and other
matters contained herein. Such statements are based on current  expectations and
beliefs  and  involve a number of  uncertainties  and risks that could cause the
actual results to differ materially from those projected. Such uncertainties and
risks  include,  but are not limited to, the  cyclicality  of the  semiconductor
industry,   impediments  to  customer  acceptance,   fluctuations  in  quarterly
operating results, competitive pricing pressures, the introduction of competitor
products having technological and/or pricing advantages,  product volume and mix
and other  risks  detailed  from time to time in our SEC  reports.  For  further
information,  refer  to the  business  description  and  risk  factors  sections
included in our Form 10-K for the year ended March 31, 2003 and the risk factors
section included in this Form 10-Q (Part II, Item 5) as filed with the SEC.


RESULTS OF OPERATIONS

     Tegal  designs,   manufactures,   markets  and  services  plasma  etch  and
deposition  systems that enable the production of integrated  circuits  ("ICs"),
memory and related microelectronics devices used in personal computers, wireless
voice  and data  telecommunications,  contact-less  transaction  devices,  radio
frequency  identification  devices  ("RFID's"),  smart  cards,  data storage and
micro-level actuators. Etching and deposition constitute two of the principal IC
and related device production  process steps and each must be performed numerous
times in the production of such devices.

    The following  table sets forth certain  financial  items as a percentage of
revenue for the three-month period ended June 30, 2003 and 2002:


                                                                                           THREE MONTHS
                                                                                               ENDED
                                                                                             JUNE 30,
                                                                                             --------
                                                                                         2003      2002
                                                                                         ----      ----
                     Revenue:
                                                                                             
                        Product revenue.............................................      91.2%     88.5%
                        Services revenue............................................       8.8      11.5
                                                                                         -----     -----
                           Total revenue............................................     100.0     100.0
                     Cost of sales:
                        Cost of product.............................................      64.1      76.7
                        Cost of services............................................       9.2      17.8
                                                                                         -----     -----
                           Total cost of sales......................................      73.3      94.5
                                                                                         -----     -----
                        Gross profit................................................      26.7       5.5
                     Operating expenses:
                        Research and development....................................      18.1      34.3
                        Sales and marketing.........................................      15.8      17.7
                        General and administrative..................................      26.8      28.3
                                                                                         -----     -----
                           Total operating expenses.................................      60.7      80.3
                                                                                         -----     -----
                              Operating loss........................................     (34.0)    (74.8)
                     Other income (expense), net....................................       1.5      (1.7)
                                                                                         -----     -----
                              Net loss..............................................     (32.5)    (76.5)
                                                                                         =====     =====


    Product  Revenue.  Revenue for the three months ended June 30, 2003 was $3.5
million, an increase of $0.2 million or 7.5% over the comparable period in 2002.
The increase for the three months ended June 30, 2003 was principally due to the
sale of three fewer 900 series  systems  offset by one more 6500  series  system
over the same period in the prior year.

    Services Revenue.  Revenue from service sales was $0.3 million for the three
month period ended June 30, 2003,  down slightly from $0.4 million for the three
month  period ended June 30,  2002,  which we believe is a result of  customers'
continued  decreased  utilization  of Tegal's  etch  systems  during the current
industry downturn.

                                       12


    International  sales as a percentage of our revenue were  approximately  82%
and 74% for the three  months  ended June 30,  2003 and 2002,  respectively.  We
believe  that  international  sales will  continue to  represent  a  significant
portion of our revenue.

    Gross profit. Gross profit as a percentage of revenue (gross margin) was 27%
and 6% for the three  months  ended June 30,  2003 and 2002,  respectively.  The
increase in gross margin for the three  months ended June 30, 2003,  compared to
the same period in the prior year, was principally attributable to the decreased
overhead spending as a result of our continued cost cutting initiatives.

    Research  and  development.   Research  and  development   expenses  consist
primarily of salaries,  prototype  material and other costs  associated with our
ongoing  systems  and process  technology  development,  applications  and field
process support efforts. Research and development expenses were $0.7 million and
$1.3 million for the three  months  ended June 30, 2003 and 2002,  respectively,
representing 18% and 34% of revenue,  respectively. The decrease in research and
development  spending is due to the  completion and  implementation  of specific
projects and the continued cost reduction efforts.

    Sales and  marketing.  Sales and  marketing  expenses  consist  primarily of
salaries,  commissions,  trade show  promotion  and  travel and living  expenses
associated with those  functions.  Sales and marketing  expenses were relatively
flat year over year at $0.6  million and $0.7 million for the three months ended
June 30,  2003 and  2002,  respectively,  representing  16% and 18% of  revenue,
respectively.

    General and  administrative.  General and  administrative  expenses  consist
primarily of compensation for general management,  accounting and finance, human
resources,  information  systems and investor relations functions and for legal,
consulting  and  accounting  fees of the  Company.  General  and  administrative
expenses remained  relatively flat year-to-year at $1.0 million and $1.1 million
for the three  months ended June 30, 2003 and 2002,  respectively,  representing
27% and 28% of revenue, respectively.

    Other income (expense),  net. Other income (expense), net consists primarily
of interest  expense on the domestic line of credit offset by interest income on
outstanding cash balances, and gains and losses on foreign exchange.

LIQUIDITY AND CAPITAL RESOURCES

     For the  three-month  periods ended June 30, 2003 and 2002, we financed our
operations  through the use of outstanding cash balances and borrowings  against
our promissory note borrowing  facilities in Japan, as well as our domestic line
of credit.

     Net cash used in operations  was $0.2 million during the three months ended
June 30, 2003, due  principally to a net loss of $0.9 million after deduction of
depreciation and  amortization,  an increase in accounts  receivable and prepaid
assets, offset in part by a decrease in inventories, and an increase in accounts
payable, other accrued liabilities and deferred revenue.

     Capital  expenditures  were  negligible for the three months ended June 30,
2003 and 2002.

     Net cash received from  financing  activities  totaled $0.5 million for the
three months ended June 30, 2003 and was primarily  related to the proceeds from
the initial sale of  convertible  debentures on June 30, 2003.  The decrease for
the three months ended June 30, 2002 was due principally to decreased  borrowing
against the line of credit.

     On June 30, 2003 the Company  entered into an Amended Letter  Agreement and
Subordination  Agreement with Silicon Valley Bank, which subordinated the bank's
interest in Tegal's  intellectual  property to the investors in the  Convertible
Debt Financing (See Note 9). The Company agreed not to request,  until such time
as the investors' security interest in the intellectual property was terminated,
any loan, letter of credit,  foreign exchange forward contract,  cash management
service or credit  accommodation under the Company's current line of credit with
Silicon  Valley Bank. At June 30, 2003,  the Company had no amounts  outstanding
under  this  domestic  line  of  credit,   which  had  been   collateralized  by
substantially all of the Company's domestic assets and which was further limited
by the amounts of accounts  receivable and inventories on the balance sheet. The
facility had a maximum borrowing capacity of $10.0 million, and bore interest at
prime plus 1.0  percent,  or 5.25  percent as of June 30,  2003.  The Company is
currently  negotiating with Silicon Valley Bank to modify this line of credit to
allow renewed  borrowing at  substantially  the same terms and  conditions,  but
including the receivables of its Japanese subsidiary.

     As of June 30, 2003, the Company's  Japanese  subsidiary had  approximately
$0.2  million  outstanding  under its bank line of credit  which is  secured  by
Japanese customer promissory notes held by such subsidiary in advance of payment
on customers'  accounts  receivable.  The Japanese  bank line bears  interest at
Japanese  prime  (1.375  percent as of June 30,  2003) plus 1.0  percent,  has a
renewal

                                       13

date of September 30, 2003,  and has a total capacity of 150 million yen
(approximately $1.3 million at exchange rates prevailing on June 30, 2003).

     Notes  payable as of June 30,  2003  consisted  of two  outstanding  notes,
including  one to the  California  Trade and  Commerce  Agency and  another to a
retiring  officer of Sputtered  Films,  Inc. for $0.2 million and $0.1  million,
respectively.  The unsecured note from the California  Trade and Commerce Agency
carries an annual  interest  rate of 5.75  percent with  monthly  interest  only
payments of  approximately  forty-two  hundred  dollars per month.  Although the
payment  deadlines are being met, the note is currently in technical default due
to the merger of Sputtered Films and Tegal Corporation.  The unsecured note from
the retiring officer of Sputtered Films, Inc. carries an annual interest rate of
10.0 percent.

     The Company also entered into a Convertible  Debenture Financing,  which is
described in Note 9 to the  financial  statements.  The  convertible  debentures
include a material  adverse change clause which allows the debenture  holders to
demand the  immediate  payment of all  outstanding  balances  upon the debenture
holders'  determination  of the occurrence of deemed material adverse changes to
our financial  condition,  business or operations as determined by the debenture
holders  based on required  financial  reporting and other  criteria.  Potential
material adverse changes causing us to default on the Debentures may include any
significant  adverse effect on our financial condition arising from an event not
previously  disclosed  in our  SEC  filings  such  as a  significant  litigation
judgment against Tegal, bankruptcy,  termination of the majority of our customer
relationships,  or failure to obtain stockholder approval of a second closing of
the sale of an additional  $6.2 million  principal  amount of our 2% Convertible
Secured Debentures Due 2011 and warrants.

     The consolidated financial statements contemplate the realization of assets
and the  satisfaction  of  liabilities  in the normal  course of  business.  The
Company  incurred  net losses of $1.3  million and $2.8  million for the periods
ended June 30, 2003 and 2002,  respectively,  generated negative cash flows from
operations of $0.2 million and $2.0 million in these periods, and has a cash and
cash  equivalents  balance  of $1.2  million  at June  30,  2003,  which  raises
substantial doubt about its ability to continue as a going concern. In addition,
our auditors have included a going concern uncertainty  explanatory paragraph in
their latest auditors' report dated June 10, 2003, which is included in our 10-K
for the year ended March 31, 2003. Management believes that its responses to the
unfolding  business  climate,  including  the recent  staff  reduction,  and the
Company's currently available financial resources,  including cash on hand, will
be adequate to fund operations through fiscal year 2004. The Company raised $0.9
million from the first stage of a private  placement of  convertible  debentures
and warrants on June 30, 2003. In addition,  the Company expects to complete the
second stage of this convertible debt financing in August 2003,  contingent upon
stockholder approval.  The second stage of the financing,  involving the private
placement  of  additional  convertible  debentures  and  warrants  to  the  same
investors  as the first stage,  will result in gross  proceeds to the Company of
$6.2  million.  (See  Note  9.)  There  is  no  assurance,   however,  that  the
stockholders of Tegal will approve the second stage of this financing, and there
is no assurance,  that additional financing,  if required,  will be available on
reasonable terms or at all.


     For more information on our capital  resources,  see "Risk Factors" in Part
II, Item 5.

ITEM 3. QUANTITATIVE AND QUALITATIVE DISCLOSURES ABOUT MARKET RISK

     Our cash equivalents are principally comprised of money market accounts. As
of June  30,  2003,  we had cash and cash  equivalents  of $1.2  million.  These
accounts  are  subject  to  interest  rate  risk and may fall in value if market
interest  rates  increase.  We  attempt  to limit  this  exposure  by  investing
primarily in  short-term  securities  having a maturity of three months or less.
Due to the nature of our cash and cash equivalents, we have concluded that there
is no material market risk exposure.

     We have foreign  subsidiaries that operate and sell our products in various
global  markets.  As a  result,  our  cash  flow and  earnings  are  exposed  to
fluctuations  in interest and foreign  currency  exchange  rates.  We attempt to
limit these exposures  through the use of various hedge  instruments,  primarily
forward  exchange  contracts and currency option  contracts (with  maturities of
less than three months) to manage our exposure  associated with firm commitments
and net asset and liability positions denominated in non-functional  currencies.
There have been no material changes  regarding market risk since the disclosures
made in our Form 10-K for the fiscal year ended March 31, 2003.

ITEM 4. CONTROLS AND PROCEDURES

     We maintain  disclosure controls and procedures that are designed to ensure
that  information  required  to be  disclosed  in our  Exchange  Act  reports is
recorded,  processed,  summarized and reported within the time periods specified
in the SEC's  rules and forms,

                                       14

and that such  information is accumulated  and  communicated  to our management,
including  our  Chief  Executive  Officer  and  Chief  Financial   Officer,   as
appropriate,  to  allow  timely  decisions  regarding  required  disclosure.  In
designing and  evaluating  the disclosure  controls and  procedures,  management
recognized  that any controls and  procedures,  no matter how well  designed and
operated, can provide only reasonable assurance of achieving the desired control
objectives,   and,  in  reaching   reasonable  level  of  assurance   management
necessarily  was required to apply its judgment in evaluating  the  cost-benefit
relationship of possible controls and procedures.

     As required by SEC Rule  13a-15(b),  the Company carried out an evaluation,
under the supervision and with the  participation  of the Company's  management,
including  the  Company's  Chief  Executive  Officer  and  the  Company's  Chief
Financial  Officer,  of the  effectiveness  of the design and  operation  of the
Company's  disclosure  controls  and  procedures  as of the  end of the  quarter
covered by this report.  Based on the foregoing,  the Company's  Chief Executive
Officer and Chief  Financial  Officer  concluded  that the Company's  disclosure
controls and procedures were effective at the reasonable assurance level.

     There has been no change in the Company's  internal controls over financial
reporting  during the Company's  most recent fiscal  quarter that has materially
affected,  or is reasonably likely to materially  affect, the Company's internal
controls over financial reporting.




                                       15




                          PART II -- OTHER INFORMATION

ITEM 1. LEGAL PROCEEDINGS

    On March 17, 1998,  Tegal filed suit in the United States  District Court in
the Eastern  District of Virginia  against  Tokyo  Electron  America,  Inc.  and
several of its affiliated  companies  (the "TEA case")  alleging that TEL's 65DI
and 85DI IEM etch equipment  infringe certain of Tegal's  patents.  The TEA case
was tried in the District  Court in May 1999,  and on August 31, 1999, the Court
found both patents-in-suit valid, and found that TEA had willfully infringed our
`223  dual-frequency  triode etcher patent. The District Court enjoined TEA from
further  sales or service of its IEM etchers.  In addition,  the District  Court
ordered  TEA to pay  attorney's  fees and court costs to Tegal.  On appeal,  the
Federal Circuit  affirmed the District  Court's findings of infringement and the
interpretations  of the `223  patent on which  those  findings  were  made,  but
reversed  certain  findings  relating  to TEA's  defense of  anticipation.  As a
result, the Federal Circuit vacated the judgment and the injunction and remanded
the  case  for  further  consideration  of  the  anticipation  defense.  Further
proceedings before the District Court to address TEA's anticipation defense have
yet to be scheduled.  In a separate but related  action  against Tokyo  Electron
Limited (the "TEL case")  concerning a later  generation of etchers known as the
Advanced IEM or AIEM, the United States District Court for the Eastern  District
of Virginia  granted summary judgment of  non-infringement  for TEL on August 7,
2000 and entered  judgment for TEL on September  11, 2000.  On February 1, 2002,
the Federal Circuit  affirmed the District  Court's decision on summary judgment
that the AIEM does not infringe the `223. The Federal Circuit's  decision in the
TEL case is now final.  Although many issues have now been fully resolved in the
litigation  against  the Tokyo  Electron  entities as  reported  above,  further
proceedings  in the TEA case are still  pending.  Thus,  we cannot assure you at
this stage of the ultimate outcome of these  litigations or of the effect of any
such outcome on our business.


    On September 1, 1999, the Company filed a patent infringement action against
Lam Research  Corporation  (the "Lam case"),  asserting  infringement  of two of
Tegal's patents directed to dual frequency plasma  processing  technologies (the
"`618 and the `223 patents").  Tegal sought  injunctive  relief barring Lam from
manufacturing,  selling and supporting  products that  incorporate  its patented
technology. The Company further sought enhanced damages for willful infringement
of its patents. The suit was initially filed in United States District Court for
the  Eastern  District of  Virginia,  but was  transferred  by that court to the
United States District Court of the Northern  District of California.  Following
an adverse  decision  from the United  States  Court of Appeals  for the Federal
Circuit  in a prior case  against  Tokyo  Electron  Limited,  Tegal  voluntarily
dismissed  the '223 patent from the Lam case. A Markman  hearing was held on the
'618  patent  in July  2002,  and in  September  2002 the  Court  issued a claim
interpretation ruling in which it determined that the claim term "low frequency"
means "less than  approximately  1Mhz." In October 2002,  Lam filed a motion for
summary judgment of  non-infringement  of the '618 patent.  On January 14, 2003,
after  modifying  its  original  Markman  ruling and further  interpreting  "low
frequency" to have an upper limit of 1.4 Mhz, the Court granted Lam's motion for
summary judgment of noninfringement of the '618 patent.  Thereafter,  Lam sought
to pursue a counterclaim alleging that the case ought to be deemed "exceptional"
under 28 U.S.C.  ss. 285, thus  justifying  an award of  attorney's  fees in its
favor.  On June 13, 2003, the Court issued an order finding that the case is not
"exceptional" and declining to award Lam its attorney's fees.  Neither party has
appealed  any of the  rulings  made by the  District  Court and the time to file
appeals has now run. Thus, the outcome of the litigation is now final.

ITEM 2. CHANGES IN SECURITIES AND USE OF PROCEEDS
On June 30,  2003,  the Company  closed a private  placement in which it sold to
accredited  investors  $0.9  million  principal  amount of its 2.0%  Convertible
Secured  Debentures  Due 2011 and  warrants  initially  exercisable  for 531,111
shares  of common  stock.  The  Debentures  and  accrued  interest  thereon  are
convertible  into shares of the  Company's  common stock at a price of $0.35 per
share.  The warrants  have an exercise  price of $0.50 per share and expire June
30, 2011. The sale and issuance of these securities was exempt from registration
under the Securities Act pursuant to Section 4(2) thereof, on the basis that the
transaction  did not involve a public  offering.  The Company intends to use the
net proceeds from these securities for general corporate purposes. In June 2003,
the Company  issued stock  options to purchase  300,000  shares of the Company's
common stock to the landlord of its  Petaluma  facility,  as part of a new lease
agreement,  and options to purchase 60,000 shares of the Company's  common stock
to a service  provider for services  rendered.  The options to the landlord were
valued at $0.1 million included in other assets using the  Black-Scholes  model.
The  issuance  of these  securities  was  exempt  from  registration  under  the
Securities  Act  pursuant  to  Section  4(2)  thereof,  on the  basis  that  the
transaction  did not involve a public  offering.  The Company intends to use the
net proceeds from these securities for general corporate purposes.

ITEM 4. SUBMISSION OF MATTERS TO A VOTE OF SECURITY HOLDERS

On April  28,  2003 at a  special  meeting  of our  stockholders,  our  board of
directors  was granted  the  authority  to effect a reverse  split of our common
stock  within a range of  two-for-one  to  fifteen-for-one.  Please refer to our
Proxy Statement filed on Schedule 14-A on

                                       16

April 3, 2003 for a description  of the matter voted upon at the meeting.  There
were present at the meeting,  in person or by proxy,  the holders of  13,876,204
shares of  common  Stock of the  Company,  representing  86% of the total  votes
eligible  to be cast,  constituting  a  majority  and more  than a quorum of the
outstanding shares entitled to vote. The votes were tallied as follows:

   For............................................................   12,415,043
   Against........................................................    1,440,791
   Abstain........................................................       20,370
   Broker Non Vote................................................            0


ITEM 5. OTHER INFORMATION

     In  accordance  with Section  10A(i)(2) of the  Securities  Exchange Act of
1934, as added by Section 202 of the  Sarbanes-Oxley Act of 2002 (the "Act"), we
are required to disclose the non-audit  services approved by our Audit Committee
to be performed by PricewaterhouseCoopers  LLP, our external auditor.  Non-audit
services  are  defined  in the Act as  services  other than  those  provided  in
connection  with an audit or a review of the financial  statements of a company.
The Audit  Committee has approved the engagement of  PricewaterhouseCoopers  LLP
for the  following  non-audit  services:  the  preparation  of federal and state
income tax returns.

     On September 6, 2002, we received  notification from Nasdaq that for the 30
days prior to the  notice,  the price of our common  stock had closed  below the
minimum  $1.00 per share bid price  requirement  for continued  inclusion  under
Marketplace Rule 4450(a)(5) (the "Rule"), and were provided 90 calendar days, or
until December 5, 2002, to regain compliance.  Our bid price did not close above
the minimum  during that period.  On December 6, 2002, we received  notification
from  Nasdaq that our  securities  would be  delisted  from The Nasdaq  National
Market,  the  exchange  on which our stock was listed  prior to May 6, 2003,  on
December 16, 2002 unless we either (i) applied to transfer our securities to The
Nasdaq SmallCap  Market,  in which case we would be afforded  additional time to
come into  compliance  with the  minimum  $1.00 bid price  requirement;  or (ii)
appealed the Nasdaq staff's determination to the Nasdaq's Listing Qualifications
Panel (the  "Panel").  On December 12, 2002 we requested an oral hearing  before
the Panel and such  hearing took place on January 16, 2003 in  Washington,  D.C.
Our appeal was based,  among other things,  on our intention to seek stockholder
approval for a reverse split of our outstanding  common stock. On April 28, 2003
at a special meeting of our stockholders, our board of directors was granted the
authority  to  effect a  reverse  split of our  common  stock  within a range of
two-for-one to fifteen-for-one. The timing and ratio of a reverse split, if any,
is at the  sole  discretion  of our  board  of  directors.  On May 6,  2003,  we
transferred  the listing of our common stock to the Nasdaq SmallCap  Market.  In
connection with this transfer, Nasdaq granted us an extension until September 2,
2003,  to regain  compliance  with the Rule's  minimum $1.00 per share bid price
requirement for continued  inclusion on the Nasdaq SmallCap Market (which may be
further  extended to December 1, 2003 so long as the company  continues  to meet
other continued listing requirements).

         If we  are  out  of  compliance  in  the  future  with  Nasdaq  listing
requirements,  we may take actions in order to achieve compliance, which actions
may  include  a reverse  split of our  common  stock.  If an  initial  delisting
decision is made by the Nasdaq's  staff, we may appeal the decision as permitted
by Nasdaq rules.  If we are delisted and cannot obtain  listing on another major
market or exchange,  our stock's  liquidity  would  suffer,  and we would likely
experience reduced investor  interest.  Such factors may result in a decrease in
our  stock's  trading  price.  Delisting  also  may  restrict  us  from  issuing
additional securities or securing additional financing.

RISK FACTORS

WE HAVE INCURRED  OPERATING LOSSES AND MAY NOT BE PROFITABLE IN THE FUTURE;  OUR
PLANS TO MAINTAIN AND INCREASE  LIQUIDITY MAY NOT BE  SUCCESSFUL;  OUR AUDITORS'
REPORT INCLUDES A GOING CONCERN UNCERTAINTY EXPLANATORY PARAGRAPH.

         We incurred net losses of $12.6  million and $8.7 million for the years
ended March 31, 2003 and 2002,  respectively,  and generated negative cash flows
from operations of $6.0 million and $3.6 million in these  respective  years. In
addition, we continue to generate losses and negative cash flows from operations
through June 30, 2003. These factors raise  substantial  doubt as to our ability
to continue as a going  concern,  and our auditors have included a going concern
uncertainty  explanatory  paragraph in their latest  auditors' report dated June
10, 2003 which is included  in our 10-K for the year ended March 31,  2003.  Our
plans to maintain  and increase  liquidity  include the  restructuring  executed
during fiscal 2002 and 2003,  which reduced  headcount  from 155 employees to 81
employees and has reduced our cost  structure  entering  fiscal 2004. We believe
the cost  reduction  and a projected  increase in sales during  fiscal 2004 will
generate  sufficient  cash flows to fund our operations  through March 31, 2004.
However,  these  projected  sales  are to a limited  number of new and  existing
customers and are based,  for the most part,  on internal and customer  provided
estimates of future demand,  not firm customer orders. If the projected sales do
not  materialize,  we will need to reduce expenses  further and raise
                                       17
<page>

additional  capital  through  the  issuance  of debt or  equity  securities.  If
additional  funds are raised  through the issuance of  preferred  stock or debt,
these securities could have rights, privileges or preferences senior to those of
our  common  stock,  and  debt  covenants  could  impose   restrictions  on  our
operations.  The sale of equity or debt could result in  additional  dilution to
current  stockholders,  and  such  financing  may  not  be  available  to  us on
acceptable  terms,  if at all.  The  consolidated  financial  statements  do not
include any adjustments  relating to the  recoverability  and  classification of
recorded  assets or the amount or  classification  of  liabilities  or any other
adjustments  that might be necessary  should we be unable to continue as a going
concern.

OUR DEBENTURES INCLUDE A MATERIAL ADVERSE CHANGE CLAUSE.

         As  disclosed  in our Current  Report on Form 8-K filed with the SEC on
June 2, 2003,  our 2%  Convertible  Secured  Debentures Due 2011 that we sold on
June 30, 2003 include a material  adverse change clause.  This material  adverse
change clause allows the  debenture  holders to demand the immediate  payment of
all  outstanding  balances  upon the  debenture  holders'  determination  of the
occurrence  of deemed  material  adverse  changes  to our  financial  condition,
business or operations as determined by the debenture  holders based on required
financial  reporting and other  criteria.  Potential  material  adverse  changes
causing us to default on the  Debentures  may  include any  significant  adverse
effect on our financial condition arising from an event not previously disclosed
in our SEC filings such as a  significant  litigation  judgment  against  Tegal,
bankruptcy,  termination  of the  majority  of our  customer  relationships,  or
failure to obtain  stockholder  approval  of a second  closing of the sale of an
additional  $6.2  million  principal  amount  of  our  2%  Convertible   Secured
Debentures Due 2011 and warrants.  As of July 31, 2003,  $0.9 million  principal
amount of our 2% Convertible  Secured  Debentures Due 2011 plus accrued interest
could be demanded for immediate  payment by the  Debenture  holders upon such an
event of  default.  In the event of such a demand,  Tegal  would  need to pursue
additional funding for repayment of such amount, or risk insolvency.

THE  CONVERSION  OF OUR  CONVERTIBLE  SECURITIES,  THE  EXERCISE OF  OUTSTANDING
WARRANTS,  OPTIONS AND OTHER RIGHTS TO OBTAIN ADDITIONAL SHARES COULD DILUTE THE
VALUE OF THE SHARES.



         As of August 1, 2003,  there are Debentures  convertible into 2,655,554
shares of our  common  stock  (all of which are based on a  conversion  price of
$0.35 per share and a cash payment in lieu of any  fractional  share),  warrants
exercisable for  approximately  2,229,653 shares of our common stock and options
exercisable for approximately 1,474,725 shares of our common stock. If we obtain
stockholder  approval of the sale of an additional $6.2 million principal amount
of our Debentures and warrants,  these  additional  Debentures will be initially
convertible into 17,815,714 shares of common stock, and the additional  warrants
will be exercisable for 3,563,143 shares of common stock.



         The  conversion  of these  convertible  securities  and the exercise of
these  warrants  could  result in  dilution  in the  value of the  shares of our
outstanding common stock and the voting power represented  thereby. In addition,
the conversion price of the Debentures or the exercise price of the warrants may
be lowered  under the price  adjustment  provisions  in the event of a "dilutive
issuance," that is, if we issue common stock at any time prior to their maturity
at a per share price below such conversion or exercise price, either directly or
in connection  with the issuance of  securities  that are  convertible  into, or
exercisable  for,  shares of our common stock. A reduction in the exercise price
may result in the issuance of a significant number of additional shares upon the
exercise of the warrants.

         Neither the Debentures nor the warrants  establish a "floor" that would
limit  reductions  in such  conversion  price or exercise  price.  The  downward
adjustment of the conversion price of these Debentures and of the exercise price
of these warrants could result in further dilution in the value of the shares of
our outstanding common stock and the voting power represented thereby.


SALES OF SUBSTANTIAL AMOUNTS OF OUR SHARES OF COMMON STOCK COULD CAUSE THE PRICE
OF OUR COMMON STOCK TO GO DOWN.

         To the extent the holders of our  convertible  securities  and warrants
convert or exercise such securities and then sell the shares of our common stock
they receive upon  conversion  or exercise,  our stock price may decrease due to
the additional amount of shares available in the market. The subsequent sales of
these shares could encourage short sales by our stockholders  and others,  which
could place further downward pressure on our stock price.  Moreover,  holders of
these  convertible  securities  and  warrants  may hedge their  positions in our
common stock by shorting our common stock,  which could further adversely affect
our stock  price.  The  effect of these  activities  on our  stock  price  could
increase  the  number  of  shares  issuable  upon  future   conversions  of  our
convertible securities or exercises of our warrants.

                                       18

         Should we  receive  stockholder  approval  to  increase  the  number of
authorized  shares of common stock to 100 million shares and/or effect a reverse
stock split, we may also issue additional capital stock,  convertible securities
and/or warrants to raise capital in the future. In addition, we may elect to pay
any accrued  interest on the outstanding  $0.9 million and proposed $6.2 million
(subject to stockholder  approval) principal amount of Debentures with shares of
our common stock.  Interest on the  Debentures  is calculated  quarter-annually,
based on 2% per annum on the  principal  amount  outstanding.  In  addition,  to
attract and retain key personnel, we may issue additional securities,  including
stock options. All of the above could result in additional dilution of the value
of our common stock and the voting power represented  thereby. No prediction can
be made as to the  effect,  if any,  that  future  sales of shares of our common
stock,  or the  availability  of shares for future sale, will have on the market
price of our common stock  prevailing  from time to time.  Sales of  substantial
amounts of shares of our common stock in the public  market,  or the  perception
that such sales could occur, may adversely affect the market price of our common
stock and may make it more difficult for us to sell our equity securities in the
future at a time and price which we deem appropriate. Public or private sales of
substantial  amounts of shares of our common  stock by persons or entities  that
have exercised  options and/or  warrants could  adversely  affect the prevailing
market price of the shares of our common stock.

THE  SEMICONDUCTOR  INDUSTRY IS CYCLICAL AND MAY EXPERIENCE  PERIODIC  DOWNTURNS
THAT MAY NEGATIVELY AFFECT CUSTOMER DEMAND FOR OUR PRODUCTS AND RESULT IN LOSSES
SUCH AS THOSE EXPERIENCED IN THE PAST.

         Our business  depends upon the capital  expenditures  of  semiconductor
manufacturers, which in turn depend on the current and anticipated market demand
for  integrated  circuits.  The  semiconductor  industry is highly  cyclical and
historically  has  experienced  periodic  downturns,  which  often  have  had  a
detrimental  effect on the  semiconductor  industry's  demand for  semiconductor
capital equipment,  including etch and deposition systems manufactured by us. In
response  to the  current  prolonged  industry  slow-down,  we have  initiated a
substantial  cost  containment  program and a  corporate-wide  restructuring  to
preserve our cash.  However,  the need for continued  investment in research and
development,  possible  capital  equipment  requirements  and extensive  ongoing
customer service and support  requirements  worldwide will continue to limit our
ability to reduce expenses in response to the current downturn.

OUR COMPETITORS  HAVE GREATER  FINANCIAL  RESOURCES AND GREATER NAME RECOGNITION
THAN WE DO AND  THEREFORE  MAY COMPETE MORE  SUCCESSFULLY  IN THE  SEMICONDUCTOR
CAPITAL EQUIPMENT INDUSTRY THAN WE CAN.

         We  believe  that  to  be  competitive,  we  will  require  significant
financial  resources  in order to offer a broad  range of  systems,  to maintain
customer  service and support  centers  worldwide  and to invest in research and
development.  Many of our existing and potential competitors,  including,  among
others,  Applied Materials,  Inc., Lam Research Corporation,  Novellus and Tokyo
Electron Limited, have substantially greater financial resources, more extensive
engineering,   manufacturing,   marketing  and  customer   service  and  support
capabilities,  larger installed bases of current generation etch, deposition and
other production equipment and broader process equipment  offerings,  as well as
greater name  recognition  than we do. We cannot assure you that we will be able
to compete  successfully against these companies in the United States of America
or worldwide.

IF WE FAIL TO MEET  THE  CONTINUED  LISTING  REQUIREMENTS  OF THE  NASDAQ  STOCK
MARKET, OUR STOCK COULD BE DELISTED.

         Our stock is currently listed on The Nasdaq SmallCap Market. The Nasdaq
Stock Market's  Marketplace Rules impose certain minimum financial  requirements
on us for the  continued  listing  of our  stock.  One such  requirement  is the
minimum bid price on our stock of $1.00 per share. Beginning in 2002, there have
been periods of time during which we have been out of compliance  with the $1.00
minimum bid requirements of the Nasdaq SmallCap Market.

         On September 6, 2002, we received notification from Nasdaq that for the
30 days prior to the notice,  the price of our common stock had closed below the
minimum  $1.00 per share bid price  requirement  for continued  inclusion  under
Marketplace Rule 4450(a)(5) (the "Rule"), and were provided 90 calendar days, or
until December 5, 2002, to regain compliance.  Our bid price did not close above
the minimum  during that period.  On December 6, 2002, we received  notification
from  Nasdaq that our  securities  would be  delisted  from The Nasdaq  National
Market,  the  exchange  on which our stock was listed  prior to May 6, 2003,  on
December 16, 2002 unless we either (i) applied to transfer our securities to The
Nasdaq SmallCap  Market,  in which case we would be afforded  additional time to
come into  compliance  with the  minimum  $1.00 bid price  requirement;  or (ii)
appealed the Nasdaq staff's determination to the Nasdaq's Listing Qualifications
Panel (the  "Panel").  On December 12, 2002 we requested an oral hearing  before
the Panel and such  hearing took place on January 16, 2003 in  Washington,  D.C.
Our appeal was based,  among other things,  on our intention to seek stockholder
approval for a reverse split of our outstanding  common stock. On April 28, 2003
at a special meeting of our stockholders, our board of directors was granted the
authority  to  effect a  reverse  split of our  common  stock  within a range of
two-for-one to fifteen-

                                       19

for-one.  The  timing  and  ratio of a  reverse  split,  if any,  is at the sole
discretion of our board of directors. On May 6, 2003, we transferred the listing
of our common  stock to the Nasdaq  SmallCap  Market.  In  connection  with this
transfer,  Nasdaq  granted us an extension  until  September 2, 2003,  to regain
compliance  with the Rule's  minimum $1.00 per share bid price  requirement  for
continued inclusion on the Nasdaq SmallCap Market (which may be further extended
to  December 1, 2003 so long as the company  continues  to meet other  continued
listing requirements).

         If we  are  out  of  compliance  in  the  future  with  Nasdaq  listing
requirements,  we may take actions in order to achieve compliance, which actions
may  include  a reverse  split of our  common  stock.  If an  initial  delisting
decision is made by the Nasdaq's  staff, we may appeal the decision as permitted
by Nasdaq rules.  If we are delisted and cannot obtain  listing on another major
market or exchange,  our stock's  liquidity  would  suffer,  and we would likely
experience reduced investor  interest.  Such factors may result in a decrease in
our  stock's  trading  price.  Delisting  also  may  restrict  us  from  issuing
additional securities or securing additional financing.

WE DEPEND ON SALES OF OUR  ADVANCED  PRODUCTS  TO  CUSTOMERS  THAT MAY NOT FULLY
ADOPT OUR PRODUCT FOR PRODUCTION USE.

         We have designed our advanced etch and deposition products for customer
applications in emerging new films, polysilicon and metal which we believe to be
the  leading  edge of  critical  applications  for the  production  of  advanced
semiconductor and other microelectronic  devices.  Revenues from the sale of our
advanced etch and deposition systems accounted for 25% and 36% of total revenues
in fiscal 2003 and 2002, respectively.  Our advanced systems are currently being
used primarily for research and development activities or low volume production.
For our advanced  systems to achieve full market  adoption,  our customers  must
utilize these systems for volume production.  There can be no assurance that the
market for  devices  incorporating  emerging  films,  polysilicon  or metal will
develop as quickly or to the degree we expect.

         If our  advanced  systems do not  achieve  significant  sales or volume
production  due to a lack of full customer  adoption,  our  business,  financial
condition,  results of operations  and cash flows will be  materially  adversely
affected.

OUR POTENTIAL  CUSTOMERS MAY NOT ADOPT OUR PRODUCTS BECAUSE OF THEIR SIGNIFICANT
COST OR BECAUSE OUR POTENTIAL CUSTOMERS ARE ALREADY USING A COMPETITOR'S TOOL.

         A substantial  investment is required to install and integrate  capital
equipment into a semiconductor  production line.  Additionally,  we believe that
once a device manufacturer has selected a particular vendor's capital equipment,
that  manufacturer  generally  relies  upon  that  vendor's  equipment  for that
specific  production line application  and, to the extent  possible,  subsequent
generations of that vendor's systems. Accordingly, it may be extremely difficult
to achieve  significant  sales to a particular  customer  once that customer has
selected another vendor's capital equipment unless there are compelling  reasons
to do so, such as  significant  performance or cost  advantages.  Any failure to
gain  access  and  achieve  sales to new  customers  will  adversely  affect the
successful  commercial  adoption of our  products  and could have a  detrimental
effect on us.

OUR QUARTERLY OPERATING RESULTS MAY CONTINUE TO FLUCTUATE.

         Our revenue and  operating  results have  fluctuated  and are likely to
continue to fluctuate significantly from quarter to quarter, and there can be no
assurance as to future profitability.

         Our 900 series etch systems  typically sell for prices ranging  between
$250,000 and $600,000, while prices of our 6500 series critical etch systems and
our Endeavor  deposition  system  typically  range between $1.8 million and $3.0
million. To the extent we are successful in selling our 6500 and Endeavor series
systems, the sale of a small number of these systems will probably account for a
substantial  portion of  revenue in future  quarters,  and a  transaction  for a
single system could have a substantial  impact on revenue and gross margin for a
given quarter.

     Other factors that could affect our quarterly operating results include:

o    our timing of new systems and  technology  announcements  and  releases and
     ability to transition between product versions;

o    product returns upon the  introduction of new product  versions and pricing
     adjustments for our distributors;

o    seasonal fluctuations in sales;

o    anticipated  declines  in  selling  prices  of  our  products  to  original
     equipment  manufacturers and potential  declines in selling prices to other
     parties as a result of competitive pressures;

                                       20

o    changes in the mix of our revenues  represented by our various products and
     customers;

o    adverse  changes in the level of economic  activity in the United States or
     other major economies in which we do business;

o    foreign currency exchange rate fluctuations;

o    expenses related to, and the financial impact of, possible  acquisitions of
     other businesses;

o    changes  in the timing of product  orders due to  unexpected  delays in the
     introduction  of  our  customers'  products,   due  to  lifecycles  of  our
     customers'   products  ending  earlier  than  expected  or  due  to  market
     acceptance of our customers' products; and

o    timely and accurate reporting to us by our original equipment  manufacturer
     customers of units shipped.


         Additionally,   potential   acquisitions   may  result  in  significant
expenses,  including  amortization of purchased software,  which is reflected in
cost of revenues, as well as charges for in-process research and development and
amortization of acquired identifiable  intangible assets, which are reflected in
operating expenses.

BECAUSE TECHNOLOGY CHANGES RAPIDLY, WE MAY NOT BE ABLE TO INTRODUCE OUR PRODUCTS
IN A TIMELY ENOUGH FASHION.

         The   semiconductor   manufacturing   industry   is  subject  to  rapid
technological change and new system  introductions and enhancements.  We believe
that our future  success  depends  on our  ability to  continue  to enhance  our
existing systems and their process capabilities,  and to develop and manufacture
in a timely manner new systems with improved process capabilities.  We may incur
substantial  unanticipated costs to ensure product functionality and reliability
early in our products'  life cycles.  There can be no assurance  that we will be
successful in the introduction and volume  manufacture of new systems or that we
will be able to  develop  and  introduce,  in a timely  manner,  new  systems or
enhancements to our existing  systems and processes which satisfy customer needs
or achieve market adoption.

SOME OF OUR SALES  CYCLES ARE  LENGTHY,  EXPOSING  US TO THE RISKS OF  INVENTORY
OBSOLESCENCE AND FLUCTUATIONS IN OPERATING RESULTS.

         Sales of our systems depend,  in significant part, upon the decision of
a prospective  customer to add new manufacturing  capacity or to expand existing
manufacturing  capacity,  both of which typically involve a significant  capital
commitment.  We often  experience  delays in finalizing  system sales  following
initial system qualification while the customer evaluates and receives approvals
for the purchase of our systems and completes a new or expanded facility. Due to
these and other factors, our systems typically have a lengthy sales cycle (often
12 to 18 months in the case of  critical  etch and  deposition  systems)  during
which we may expend  substantial  funds and  management  effort.  Lengthy  sales
cycles  subject  us  to a  number  of  significant  risks,  including  inventory
obsolescence and fluctuations in operating  results over which we have little or
no control.

WE MAY NOT BE ABLE TO PROTECT OUR  INTELLECTUAL  PROPERTY OR OBTAIN LICENSES FOR
THIRD  PARTIES'  INTELLECTUAL  PROPERTY  AND  THEREFORE  WE  MAY BE  EXPOSED  TO
LIABILITY  FOR  INFRINGEMENT  OR THE RISK THAT OUR  OPERATIONS  MAY BE ADVERSELY
AFFECTED.

         Although we attempt to protect our intellectual property rights through
patents,  copyrights,  trade secrets and other  measures,  we may not be able to
protect our technology adequately and competitors may be able to develop similar
technology independently. Additionally, patent applications that we may file may
not be  issued  and  foreign  intellectual  property  laws may not  protect  our
intellectual  property rights.  There is also a risk that patents licensed by or
issued to us will be challenged, invalidated or circumvented and that the rights
granted thereunder will not provide  competitive  advantages to us. Furthermore,
others may  independently  develop  similar  systems,  duplicate  our systems or
design around the patents licensed by or issued to us.

         Existing   litigation  and  any  future   litigation  could  result  in
substantial  cost and  diversion  of effort by us,  which by itself could have a
detrimental effect on our financial condition, operating results and cash flows.
Further,  adverse  determinations in such litigation could result in our loss of
proprietary  rights,  subject us to  significant  liabilities  to third parties,
require us to seek licenses from third parties or prevent us from  manufacturing
or selling our systems. In addition,  licenses under third parties' intellectual
property rights may not be available on reasonable terms, if at all.

OUR CUSTOMERS ARE CONCENTRATED AND THEREFORE THE LOSS OF A SIGNIFICANT  CUSTOMER
MAY HARM OUR BUSINESS.

                                       21

         Our top five  customers  accounted  for  88.2%,  54.4% and 42.0% of our
systems  revenues in fiscal 2003,  2002 and 2001,  respectively.  Four customers
each  accounted for more than 10% of net systems sales in fiscal 2003.  Although
the composition of the group comprising our largest customers may vary from year
to year,  the loss of a  significant  customer or any reduction in orders by any
significant   customer,   including  reductions  due  to  market,   economic  or
competitive conditions in the semiconductor  manufacturing  industry, may have a
detrimental effect on our business,  financial condition,  results of operations
and cash flows. Our ability to increase our sales in the future will depend,  in
part,  upon our  ability to obtain  orders  from new  customers,  as well as the
financial  condition  and  success of our  existing  customers  and the  general
economy, which is largely beyond our ability to control.

WE ARE EXPOSED TO  ADDITIONAL  RISKS  ASSOCIATED  WITH  INTERNATIONAL  SALES AND
OPERATIONS.

         International sales accounted for 66%, 67% and 61% of total revenue for
fiscal 2003,  2002 and 2001,  respectively.  International  sales are subject to
certain risks, including the imposition of government controls,  fluctuations in
the U.S. dollar (which could increase the sales price in local currencies of our
systems in foreign  markets),  changes in export  license  and other  regulatory
requirements,   tariffs  and  other  market  barriers,  political  and  economic
instability,  potential  hostilities,  restrictions  on the  export or import of
technology,  difficulties  in accounts  receivable  collection,  difficulties in
managing distributors or representatives,  difficulties in staffing and managing
international operations and potentially adverse tax consequences.  There can be
no assurance that any of these factors will not have a detrimental effect on our
operations and financial results.

         Sales of our systems in certain countries are billed in local currency,
and we have a line of credit  denominated in Japanese Yen. We generally  attempt
to offset a portion  of our U.S.  dollar  denominated  balance  sheet  exposures
subject to foreign exchange rate  remeasurement  by purchasing  forward currency
contracts for future delivery. There can be no assurance that our future results
of operations and cash flows will not be adversely  affected by foreign currency
fluctuations.  In addition,  the laws of certain countries in which our products
are sold may not provide our products and intellectual  property rights with the
same degree of protection as the laws of the United States of America.

WE MUST  INTEGRATE OUR  ACQUISITION  OF SPUTTERED  FILMS AND WE MAY NEED TO MAKE
ADDITIONAL   FUTURE   ACQUISITIONS  TO  REMAIN   COMPETITIVE.   THE  PROCESS  OF
IDENTIFYING,   ACQUIRING  AND  INTEGRATING  FUTURE  ACQUISITIONS  MAY  CONSTRAIN
VALUABLE MANAGEMENT  RESOURCES,  AND OUR FAILURE TO EFFECTIVELY INTEGRATE FUTURE
ACQUISITIONS  MAY  RESULT  IN THE  LOSS OF KEY  EMPLOYEES  AND THE  DILUTION  OF
STOCKHOLDER VALUE AND HAVE AN ADVERSE EFFECT ON OUR OPERATING RESULTS.

         We acquired  Sputtered Films, Inc. in August 2002. We may in the future
seek to acquire or invest in  additional  businesses,  products or  technologies
that we believe  could  complement  or expand our  business,  augment our market
coverage,  enhance our technical capabilities or that may otherwise offer growth
opportunities.  We may  encounter  problems with the  assimilation  of Sputtered
Films or businesses, products or technologies acquired in the future including:

o    difficulties   in   assimilation   of   acquired   personnel,   operations,
     technologies or products;

o    unanticipated costs associated with acquisitions;

o    diversion  of  management's  attention  from other  business  concerns  and
     potential disruption of our ongoing business;

o    adverse effects on our existing business relationships with our customers;

o    potential patent or trademark infringement from acquired technologies;

o    adverse  effects  on our  current  employees  and the  inability  to retain
     employees of acquired companies;

o    use of  substantial  portions of our available  cash as all or a portion of
     the purchase price; and

o    dilution  of our  current  stockholders  due  to  issuances  of  additional
     securities as consideration for acquisitions.

         If we are unable to successfully integrate our acquired companies or to
create new or enhanced products and services, we may not achieve the anticipated
benefits from our acquisitions.  If we fail to achieve the anticipated  benefits
from  the  acquisitions,  we may  incur  increased  expenses  and  experience  a
shortfall  in our  anticipated  revenues  and we may not  obtain a  satisfactory
return on our investment.  In addition,  if a significant number of employees of
acquired   companies  fail  to  remain  employed  with  us,  we  may  experience
difficulties in achieving the expected benefits of the acquisitions.

                                       22

         Completing any potential future  acquisitions  could cause  significant
diversions of management time and resources.  Financing for future  acquisitions
may  not  be  available  on  favorable  terms,  or at  all.  If we  identify  an
appropriate acquisition candidate for any of our businesses,  we may not be able
to negotiate the terms of the acquisition successfully,  finance the acquisition
or integrate the acquired business, products, technologies or employees into our
existing business and operations.  Future  acquisitions may not be well-received
by the  investment  community,  which may cause our stock price to fall. We have
not  entered  into  any  agreements  or   understanding   regarding  any  future
acquisitions  and cannot ensure that we will be able to identify or complete any
acquisition in the future.

         If we acquire  businesses,  new products or technologies in the future,
we may be required to amortize  significant  amounts of identifiable  intangible
assets and we may record significant amounts of goodwill that will be subject to
annual testing for impairment.  If we consummate one or more significant  future
acquisitions in which the  consideration  consists of stock or other securities,
our existing stockholders'  ownership could be significantly diluted. If we were
to  proceed  with one or more  significant  future  acquisitions  in  which  the
consideration  included cash, we could be required to use a substantial  portion
of our available cash.

OUR WORKFORCE  REDUCTIONS  AND FINANCIAL  PERFORMANCE  MAY ADVERSELY  AFFECT THE
MORALE AND PERFORMANCE OF OUR PERSONNEL AND OUR ABILITY TO HIRE NEW PERSONNEL.

         We have made  reductions  in our workforce in order to reduce costs and
bring  staffing  in line with our  anticipated  requirements.  There  were costs
associated  with  the  workforce  reductions  related  to  severance  and  other
employee-related  costs, and our restructuring may yield unanticipated costs and
consequences,  such as  attrition  beyond our  planned  reduction  in staff.  In
addition,  our common stock has  declined in value below the  exercise  price of
many options granted to employees  pursuant to our stock option plans. Thus, the
intended benefits of the stock options granted to our employees, the creation of
performance  and  retention  incentives,  may  not  be  realized.  In  addition,
workforce  reductions and management  changes create anxiety and uncertainty and
may adversely affect employee morale. As a result, we may lose employees whom we
would prefer to retain.  As a result of these factors,  our remaining  personnel
may seek  employment  with  larger,  more  established  companies  or  companies
perceived as having less volatile stock prices.

PROVISIONS IN OUR AGREEMENTS,  CHARTER  DOCUMENTS,  STOCKHOLDER  RIGHTS PLAN AND
DELAWARE LAW MAY DETER TAKEOVER ATTEMPTS, WHICH COULD DECREASE THE VALUE OF YOUR
SHARES.

         Our  certificate of  incorporation  and bylaws and Delaware law contain
provisions  that could make it more  difficult  for a third  party to acquire us
without the consent of our board of  directors.  Our board of directors  has the
right to issue preferred stock without stockholder approval, which could be used
to dilute the stock  ownership  of a potential  hostile  acquirer.  Delaware law
imposes some restrictions on mergers and other business  combinations between us
and any holder of 15% or more of our outstanding  common stock. In addition,  we
have adopted a stockholder  rights plan that makes it more difficult for a third
party to  acquire us  without  the  approval  of our board of  directors.  These
provisions  apply  even  if the  offer  may be  considered  beneficial  by  some
stockholders.

OUR STOCK PRICE IS VOLATILE AND COULD RESULT IN A MATERIAL  DECLINE IN THE VALUE
OF YOUR INVESTMENT IN TEGAL.

         We believe that factors such as announcements  of developments  related
to our  business,  fluctuations  in our operating  results,  sales of our common
stock  into  the   marketplace,   failure  to  meet  or  changes  in   analysts'
expectations,  general conditions in the semiconductor industry or the worldwide
economy,   announcements  of  technological   innovations  or  new  products  or
enhancements  by us  or  our  competitors,  developments  in  patents  or  other
intellectual  property  rights,  developments  in  our  relationships  with  our
customers and suppliers,  natural  disasters and outbreaks of hostilities  could
cause the price of our common stock to fluctuate substantially.  In addition, in
recent  years the stock  market in  general,  and the market for shares of small
capitalization   stocks  in   particular,   have   experienced   extreme   price
fluctuations,  which have often been  unrelated to the operating  performance of
affected  companies.  There can be no  assurance  that the  market  price of our
common  stock  will  not  experience  significant  fluctuations  in the  future,
including fluctuations that are unrelated to our performance.

POTENTIAL  DISRUPTION  OF OUR SUPPLY OF MATERIALS  REQUIRED TO BUILD OUR SYSTEMS
COULD  HAVE A  NEGATIVE  EFFECT  ON  OUR  OPERATIONS  AND  DAMAGE  OUR  CUSTOMER
RELATIONSHIPS.

         Materials   delays  have  not  been   significant   in  recent   years.
Nevertheless,  we procure certain components and sub-assemblies  included in our
systems from a limited group of suppliers, and occasionally from a single source
supplier.  For  example,  we depend  on MECS  Corporation,  a robotic  equipment
supplier,  as the sole source for the robotic arm used in all of our 6500 series
systems.  We currently have no existing supply  contract with MECS  Corporation,
and we currently  purchase all robotic  assemblies  from MECS

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Corporation on a purchase  order basis.  Disruption or termination of certain of
these sources,  including our robotic sub-assembly source, could have an adverse
effect on our operations and damage our relationship with our customers.

ANY FAILURE BY US TO COMPLY WITH ENVIRONMENTAL  REGULATIONS  IMPOSED ON US COULD
SUBJECT US TO FUTURE LIABILITIES.

         We are subject to a variety of governmental  regulations related to the
use, storage,  handling,  discharge or disposal of toxic,  volatile or otherwise
hazardous  chemicals used in our manufacturing  process.  We believe that we are
currently in compliance in all material respects with these regulations and that
we have obtained all necessary  environmental  permits generally relating to the
discharge of hazardous wastes to conduct our business. Nevertheless, our failure
to comply with  present or future  regulations  could  result in  additional  or
corrective  operating  costs,  suspension  of  production,   alteration  of  our
manufacturing processes or cessation of our operations.





ITEM 6. EXHIBITS AND REPORTS ON FORM 8-K



    (a) Exhibits
      <s>         <c>
      10.1        Subordination Agreement
      10.2        SVB Amendment
       31         Certifications of the Chief Executive Officer and Chief Financial Officer pursuant to Section 302 of the
                  Sarbanes-Oxley Act of 2002.
       32         Certifications  of the  Chief  Executive Officer  and Chief  Financial  Officer  pursuant  to  Section  906 of the
                  Sarbanes-Oxley Act of 2002.



    (b) Reports on Form 8-K

        Current Report on Form 8-K filed on July 2, 2003,  under item 5 and item
7 there of.


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                                   SIGNATURES

    Pursuant to the  requirements  of the  Securities  Exchange Act of 1934, the
registrant  has duly  caused  this  report  to be  signed  on its  behalf by the
undersigned thereunto duly authorized.

                                                     TEGAL CORPORATION
                                                     (Registrant)

                                                /s/      THOMAS R. MIKA
                                                         Thomas R. Mika
                                                     Chief Financial Officer

Dated: August 14, 2003




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