Exhibit 10.2
                                  June 30, 2003

Tegal Corporation
2201 South McDowell Blvd.
Petaluma, CA  94954

Gentlemen:

         Reference is made to (i) the Loan and Security Agreement,  and the Loan
and Security  Agreement (Exim  Program),  both between you  ("Borrower")  and us
("Silicon"),  and  both  dated  as of  June  26,  2002  (as  amended,  restated,
supplemented,  or otherwise  modified from time to time,  collectively the "Loan
Agreements"),  and (ii) the  Schedule to Loan and  Security  Agreement,  and the
Schedule to Loan and Security  Agreement (Exim Program),  both between  Borrower
and  Silicon,  and  both  dated  as of June  26,  2002  (as  amended,  restated,
supplemented  or otherwise  modified from time to time,  collectively  the "Loan
Agreement  Schedules").  This  letter  agreement  (this  "Agreement"),  the Loan
Agreements,  the Loan Agreement  Schedules,  and all other written documents and
agreements  between  us  are  referred  to  herein  collectively  as  the  "Loan
Documents".  Capitalized  terms used, but not defined,  in this Agreement  shall
have  the  meanings  set  forth in the Loan  Agreements  and the Loan  Agreement
Schedules.

         You have  advised  us that you  desire  to  provide  to Orin  Hirschman
("Hirschman") a security interest in intellectual property "Collateral" (as that
term is defined in the Subordination  Agreement  referenced below), and you have
requested  that (i) such security  interest be considered a Permitted Lien under
the Loan Agreements and (ii) Silicon enter into a  Subordination  Agreement (the
"Subordination Agreement") with Hirschman pursuant to which Silicon subordinates
its security interest in the Collateral in favor of Hirshman's security interest
in the Collateral.

         Silicon hereby agrees that the security  interest of Hirschman to which
Silicon subordinates pursuant to the Subordination Agreement shall be considered
a Permitted  Lien,  based upon your  agreement  that you shall not request,  and
Silicon  shall have no  obligation to provide,  any Loan,  Letter of Credit,  FX
Forward Contract,  Cash Management Service or other credit  accommodation  under
the  Loan  Documents  (collectively,  "Credit  Accommodations")  until  45  days
following  written notice from you of your desire to have Silicon provide Credit
Accommodations,  provided  that at that  time  (i)  Silicon  has  been  provided
evidence  satisfactory  to  Silicon  that  the  security  interests  in favor of
Hirschman have been terminated,  and (ii) the  Subordination  Agreement has been
terminated  pursuant to a written  agreement  reasonably  acceptable to Silicon.
Notwithstanding the foregoing,  if a factoring arrangement is agreed to on terms
acceptable to you and Silicon (in your  discretion  and  Silicon's  discretion),
then such factoring  shall be pursuant to such agreed upon terms and not subject
to the 45-days notice requirement set forth herein.

         This Agreement, the Loan Agreements,  the Loan Agreement Schedules, and
the  other  Loan  Documents  set  forth in full all of the  representations  and
agreements  of the  parties  with  respect  to the  subject  matter  hereof  and
supersede all prior discussions, oral representations,  oral agreements and oral
understandings between the parties with respect to the subject hereof.

                                     1


Except as herein expressly  amended,  all of the respective terms and provisions
of the Loan  Agreements,  the  Loan  Agreement  Schedules,  and all  other  Loan
Documents  shall  continue  in full  force and  effect  and the same are  hereby
ratified and confirmed.  This Agreement is part of the Loan Agreements,  and the
terms of the Loan Agreements are incorporated herein by reference.

         If the foregoing  correctly sets forth our  agreement,  please sign the
enclosed copy of this Agreement and return it to us.

                                                     Sincerely yours,

                                                     Silicon Valley Bank


                                                     By   /s/ Patrick O'Donnell
                                                     Title Vice President


Acknowledged and agreed:

Borrower:

Tegal Corporation


By   /s/ Thomas R. Mika         .
     President or Vice President

By   /s/ Kathy Petrini               .
     Secretary or Assistant Secretary