EXHIBIT 24

                                Power of Attorney



                                POWER OF ATTORNEY

     KNOW ALL MEN BY THESE PRESENTS, that the undersigned Directors and Officers
of Mykrolis Corporation (the "Corporation"), do hereby constitute and appoint C.
William Zadel, Jean-Marc Pandraud, Bertrand Loy and Peter W. Walcott and each of
them individually, their true and lawful attorneys and agents to execute on
behalf of the Corporation the Form 10-K Annual Report of the Corporation for the
fiscal year ended December 31, 2002, and all such amendments or additional
instruments related thereto which such attorneys and agents may deem to be
necessary and desirable to enable the Corporation to comply with the
requirements of the Securities Exchange Act of 1934, as amended, and any
regulations, orders, or other requirements of the United States Securities and
Exchange Commission thereunder in connection with the preparation and filing of
said documents, including specifically, but without limitation of the foregoing,
power and authority to sign the names of each of such Directors and Officers on
his behalf, as such Director or Officer, as indicated below to the said Form
10-K Annual Report or documents filed or to be filed as a part of or in
connection with such Form 10-K Annual Report; and each of the undersigned hereby
ratifies and confirms all that said attorneys and agents shall do or cause to be
done by virtue thereof.

     SIGNATURE                            TITLE                      DATE
     ---------                            -----                      ----

    /s/ C. William Zadel           Chairman, Chief Executive  February 27, 2003
  --------------------------         Officer and Director
    C. William Zadel

    /s/ Richard A. Aurelio              Director              February 27, 2003
  --------------------------
    Richard A. Aurelio

    /s/ Michael A. Bradley              Director              February 27, 2003
  --------------------------
    Michael A. Bradley

    /s/ Robert E. Caldwell              Director              February 27, 2003
  --------------------------
    Robert E. Caldwell

    /s/ Michael P.C. Carns              Director              February 27, 2003
  --------------------------
    Michael P.C. Carns

    /s/ Daniel W. Christman             Director              February 27, 2003
  --------------------------
    Daniel W. Christman

    /s/ Thomas O. Pyle                  Director              February 27, 2003
  --------------------------
    Thomas O. Pyle