ALPHA INDUSTRIES, INC. AND SUBSIDIARIES


                                  EXHIBIT 21

SUBSIDIARIES OF THE REGISTRANT

 
 
        NAME                                       JURISDICTION OF INCORPORATION      
                                                                                
Alpha Industries Limited                             England                          
                                                                                      
Alpha Industries GmbH                                Germany                          
                                                                                      
Alpha Securities Corporation                         Massachusetts                    
                                                                                      
CFP Holding Company, Inc.                            Washington                       
                                                                                      
Trans-Tech, Inc.                                     Maryland                         
                                                                                      
Trans-Tech Europe SARL                               France