Exhibit 23.01 CONSENT OF INDEPENDENT ACCOUNTANTS We hereby consent to the incorporation by reference in the Registration Statements on Form S-8 (Nos. 33-95268, 333-07313 and 333-07315) of Brooks Automation , Inc., of our report dated November 19, 1996, appearing on page 23 of the Annual Report on Form 10-K for the year ended September 30, 1996. /s/ PRICE WATERHOUSE LLP Price Waterhouse LLP Boston, Massachusetts December 27, 1996