Exhibit 5.1 ----------- CHOATE, HALL & STEWART A PARTNERSHIP INCLUDING PROFESSIONAL CORPORATIONS EXCHANGE PLACE 53 STATE STREET BOSTON, MASSACHUSETTS 02109 TELEPHONE (617) 248-5000 FACSIMILE (617) 248-4000 TELEX 49615860 December 15, 1998 Aseco Corporation 500 Donald Lynch Boulevard Marlboro, MA 01752 Ladies and Gentlemen: This opinion is delivered to you in connection with the registration statement on Form S-8 (the "Registration Statement") to be filed on December 15, 1998 by Aseco Corporation (the "Company") under the Securities Act of 1933, as amended, for registration under said Act of 50,000 shares (the "Additional Shares") of common stock, $.01 par value (the "Common Stock"), of the Company. We are familiar with the Company's Third Restated Certificate of Incorporation, its Amended and Restated By-Laws, and its corporate minute book, as well as the Registration Statement. We have also examined such other documents, records and certificates and made such further investigation as we have deemed necessary for the purposes of this opinion. Based upon and subject to the foregoing, we are of the opinion that the Additional Shares to be sold by the Company under its 1993 Employee Stock Purchase Plan, as in effect on the date hereof, when issued against receipt of the agreed purchase price therefor, will be legally issued, fully paid and nonassessable. We understand that this opinion is to be used in connection with the Registration Statement and consent to the filing of this opinion as an exhibit to the Registration Statement and to all references to this Firm included therein. Very truly yours, CHOATE, HALL & STEWART