EXHIBIT 23.1 CONSENT OF INDEPENDENT AUDITORS We consent to the incorporation by reference in the Registration Statements on Form S-8 (Nos. 33-95268, 333-07313, 333-07315, 333-22717, 333-66457, 333-66429 and 333-66455) of Brooks Automation, Inc. of our report dated June 1, 1999, with respect to the financial statements of Smart Machines Inc. appearing in Amendment No. 1 to the Current Report on Form 8-K/A of Brooks Automation, Inc. dated September 29, 1999. /s/ PricewaterhouseCoopers LLP PRICEWATERHOUSECOOPERS LLP San Jose, California September 29, 1999