Exhibit 23.1
                                                                    ------------



                        CONSENT OF INDEPENDENT AUDITORS

We consent to the incorporation by reference in this Registration Statement
(Form S-8) for the registration of 150,000 shares of common stock pertaining to
the 1993 Employee Stock Purchase Plan of Aseco Corporation of our report dated
May 10, 1999, except for Note O as to which the date is July 9, 1999, with
respect to the consolidated financial statements and schedule of Aseco
Corporation included in its Annual Report (Form 10-K) for the year ended March
28, 1999, filed with the Securities and Exchange Commission.


                                                           /s/ ERNST & YOUNG LLP


Boston, Massachusetts
October 5, 1999