Exhibit 23.1

CONSENT OF INDEPENDENT AUDITORS

We consent to the incorporation by reference, in the Registration Statements 
(Form S-8 No.'s 33-81057 and 333-73445) pertaining to the 1991 Stock Option 
Plan and 1998 Directors Stock Option Plan of Trikon Technologies, Inc. of our 
report dated March 26, 1999, with respect to the consolidated financial 
statements and schedule of Trikon Technologies, Inc. included in the Annual 
Report (Form 10-K) for the year ended December 31, 1998.

                                                                 ERNST & YOUNG

Cardiff, Wales
March 30, 1999