Exhibit 3.9




                             ARTICLES OF CORRECTION
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                                     TO THE
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                              ARTICLES OF AMENDMENT
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                                     TO THE
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                       RESTATED ARTICLES OF INCORPORATION
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                                       OF
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                                 SEMITOOL, INC.
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         Pursuant  to the  provisions  of ss.  35-1-221,  MCA,  the  undersigned
corporation, hereby adopts the following Articles of Correction:

         1.       Document.  Articles of Amendment to the Restated Articles of
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Incorporation  of  Semitool,  Inc.,  were filed with the  Montana  Secretary  of
State's Office on August 21, 1995.

         2.       Error. Article II of the Articles of Amendment to the Restated
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Articles of  Incorporation  of  Semitool,  Inc.  erroneously  refers to amending
Article "V" of the Restated  Articles of  Incorporation.  Article II should have
referred to amending  Article  "IV" rather than Article "V." The purpose of this
document is to clarify that Article IV was amended rather than Article V.

         3.       Correction.  Article II of the Articles of Amendment to the
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Restated  Articles of  Incorporation  of Semitool,  Inc. are hereby corrected to
read:

                                   Article II

         Article IV of the  Corporation's  Restated Articles of Incorporation is
amended in its entirety to read as follows:

                  "The  total  number  of  shares  which  this   Corporation  is
                  authorized  to issue is  30,000,000  shares  of  common  stock
                  without  nominal  or  par  value,   and  5,000,000  shares  of
                  preferred  stock  without  nominal  or  par  value.  Upon  the
                  amendment  of this  article as herein set forth,  each two (2)
                  outstanding shares, without nominal or par value, are split up
                  and converted  into three (3) shares,  without  nominal or par
                  value."

         DATED: February 29, 2000.


                                                  SEMITOOL, INC.


                                                  By: /s/Larry Viano
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                                                  Its: Treasurer
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