UNITED STATES
SECURITIES AND EXCHANGE COMMISSION
Washington, D.C. 20549
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FORM 8-K
CURRENT REPORT
PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES AND EXCHANGE ACT OF 1934
Date of Report (Date of earliest event reported) July 10, 2000
Commission File Number
0-25424
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SEMITOOL, INC.
(Exact Name of Registrant as Specified in Its Charter)
Montana 81-0384392
(State or other jurisdiction of (I.R.S. Employer
incorporation or organization) Identification No.)
Semitool, Inc.
655 West Reserve Drive, Kalispell, Montana 59901
(406) 752-2107
(Address, including zip code, and telephone number, including
area code, of registrant's principal executive offices)
Item 5. Other Events
See the following press release, dated July 10, 2000, introducing the Company's
Paragon(TM), an ECD Cluster processing tool.
Contacts:
Semitool, Inc.
Dana Scranton
Director Strategic Marketing
(406) 751-6360
FOR IMMEDIATE RELEASE
Cluster Processing Tool developed for high volume
ECD copper processing
Semitool Unveils Its Most Advanced ECD Cluster System
Kalispell, MT -- July 10, 2000 -- Semitool, Inc. (Nasdaq: SMTL), a leading
supplier of wafer surface preparation and electrochemical deposition (ECD)
systems, today introduced the ParagonTM, a new class of copper ECD tools for
high volume processing. The Paragon represents the culmination of nearly seven
years of R&D. With its integrated functions (metrology, ECD seed layer, ECD
fill, clean, bevel etch and anneal), the Paragon is a flexible, configurable
high volume and small footprint, cluster tool for semiconductor copper
interconnect deposition.
To widen the ECD process window and enhance the integrated capabilities of the
Paragon, Semitool is teaming with Philips Analytical Inc, a unit of Royal
Philips Electronics (NYSE: PHG), to incorporate on-board metrology. The Philips'
integrated optoacoustic metrology is designed to inspect the quality of the
incoming copper seed layer and the ECD layer, enabling the Paragon to adjust the
ECD process for better results.
"Imagine," stated Dr. Jurek Koziol, Semitool's VP of Electrochemical Technology,
"a tool capable of automatic, in-situ detection and correction of incoming seed
layer non-uniformities. Imagine, also, a high throughput tool that actively
self-tunes to produce consistent results--a tool that instantaneously readjusts
to provide a different plating pattern for a specific wafer." "The Paragon,"
continued Dr. Koziol, "is turning these visions into a reality, combining
process versatility with expandability of modular and robust design."
The integration of multiple processes into one compact tool allows flexibility
in sequencing process steps while maintaining high throughput. The control
strategy of the Paragon employs the on-board analytical capability to measure
the incoming seed layer and to define the required processing conditions. The
Paragon selects or modifies a recipe to improve plating results, based on
metrology, then runs electrochemical deposition, followed by clean, etch and
anneal to stabilize the copper structure prior to CMP.
The Paragon will be displayed at Semitool's booth #1726, South Hall, Moscone
Center at SEMICON West, July 10-12 in San Francisco.
About Semitool, Inc.
Semitool is a worldwide leader in the design, development, manufacture and
support of high performance wet chemical processing equipment for use in the
fabrication of semiconductor devices. Its primary families of tools include ECD
systems for the plating of copper interconnects for integrated circuits and
other metals for various applications, and wafer surface preparation systems for
cleaning, stripping and etching processes.
Founded in 1979 and headquartered in Kalispell, Montana, Semitool maintains
sales and support centers in the United States, Europe and Asia. The Company's
stock trades on the Nasdaq National Market under the symbol SMTL.
Safe Harbor Statement
Except for historical information, the matters discussed in this news release
include forward-looking statements, including statements relating to the
acceptance, use and benefits of the Paragon. Such forward-looking statements are
subject to certain risks and uncertainties that could cause actual results to
materially differ from those projected. These risks include the risk that the
expected acceptance, use and benefits of the Paragon will not be realized, as
well as the risk that future competing technologies will render this tool and
related technology obsolete. For the discussions of the risk factors related to
our business, see the risk factors contained in the Company's Annual Report on
Form 10-K for the fiscal year ended September 30, 1999 and other filings with
the Securities and Exchange Commission. The Company assumes no obligation to
update or supplement forward-looking statements that become untrue because of
subsequent events.
Paragon is a trademark of Semitool, Inc.
For more information on Semitool, Inc. via facsimile at no cost, simply dial
1-800-PRO-INFO (1-800-776-4636) and enter the company ticker symbol, SMTL, or
visit Semitool's web site at www.semitool.com.
Signatures
Pursuant to the requirements of the Securities Exchange Act of 1934, the
Registrant has duly caused this report to be signed on its behalf by the
undersigned thereunto duly authorized.
Semitool, Inc.
(Registrant)
July 10, 2000 by
/s/William A. Freeman
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Chief Financial Officer